Patents by Inventor Chang Mun Lim

Chang Mun Lim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for forming micro patterns of semiconductor devices
    Patent number: 5821034
    Abstract: A method for forming micro patterns of a semiconductor device which uses a dipole illumination aperture adapted to transmit the spatial frequency components of light only in the X-axis direction and a dipole illumination aperture adapted to transmit the spatial frequency components of light only in the Y-axis direction, thereby obtaining the same effect as in the case using two sheets of masks to provide an increase in process margin.
    Type: Grant
    Filed: September 27, 1996
    Date of Patent: October 13, 1998
    Assignee: Hyundai Electronics Industries, Co., Ltd.
    Inventors: Hyeong Soo Kim, Chang Mun Lim, Ki Ho Baik