Patents by Inventor Chang Rak Baek

Chang Rak Baek has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS AND METHOD OF DETECTING WAFER EDGE USING LASER SCANNER, AND SEMICONDUCTOR TRANSFER DEVICE
    Publication number: 20240063039
    Abstract: An apparatus and method of detecting a wafer edge using a laser scanner, and a semiconductor transfer device are provided. The apparatus for detecting a wafer edge using a laser scanner includes a laser scanner disposed on a rear side of a mounted wafer and radiating a laser to a portion of an edge of the wafer, and a detection unit receiving an image acquired by the laser scanner and detecting the wafer edge in the image. The detection unit determines whether each wafer is present or aligned according to wafer edges detected in a plurality of wafer areas in the image.
    Type: Application
    Filed: April 17, 2023
    Publication date: February 22, 2024
    Inventors: Hee Jae BYUN, Chang Rak Baek, Kyo Bong Kim, Chan Young Choi, Wan Hee Jeong, Ki Won Han, Sang Oh Kim