Patents by Inventor Chang-Ray Chen

Chang-Ray Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6174376
    Abstract: An apparatus and a method for evacuating a process chamber by a dry pump and then shutting down the pump without back steam and high pressure safety problems are disclosed. In the apparatus, a conduit is provided for connecting in fluid communication between a process chamber and a dry pump, two gate valves are provided in the conduit with one mounted adjacent to the process chamber and the other adjacent to the dry pump. A pressure relief valve is provided and mounted to bridge over an inlet and an outlet of the second gate valve such that any pressure build-up in the conduit upstream of the second gate valve can be avoided for preventing injury to a machine operator. The back steam problem can be effectively prevented when the dry pump is shut down simultaneously with the closing of the first and the second gate valves. The pressure relief valve may be pre-set to operate automatically when a differential pressure larger than 0.33 psi is detected.
    Type: Grant
    Filed: June 1, 1999
    Date of Patent: January 16, 2001
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Heng-Yi Tseng, Chang-Ray Chen, Maw-Sheng Juang, Kuei-Chang Ho