Abstract: A method for producing black ginseng concentrate is characterized by including steps of adding red ginseng to a continuous steaming-dryer followed by steaming, cooling, and drying to prepare black ginseng, carrying out extraction by adding alcohol to crushed black ginseng obtained by crushing the black ginseng prepared above followed by filtration to prepare black ginseng extract, and concentrating the black ginseng extract prepared above by using a plate type evaporative concentrator followed by heat treatment, and the present invention also relates to black ginseng concentrate prepared by the aforementioned method.

Abstract: A cleaning equipment includes a moving module moving a wafer from a first position to a second position, and a cleaning module provided at a third position between the first and second positions and including a plurality of cells, each cell having one or more pairs of outlets and inlets, the outlets for discharging a chemical solution onto the wafer and the inlets for drawings the chemical solution from the wafer, in a movement path of the wafer. The plurality of cells are individually operated.

Abstract: Disclosed is a wafer electroplating apparatus, which includes an electroplating bath comprising an anode in the electroplating bath, an electroplating solution, and a cathode located on the top of the electroplating bath and on to which a wafer is mounted. The cathode comprises a first portion electrically connected to an edge of the wafer, and a second portion extending from the first portion and electrically connected to a side of the wafer. The direct contact of the cathode with the side and front edges of the wafer ensures uniform distribution of the electrical field on the wafer during the electroplating process. Consequently, a uniform thickness of metal film deposition is achieved.