Patents by Inventor Chang-sub Lim

Chang-sub Lim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sample for transmission electron microscope analysis having no conductive material in the electron beam path, and its manufacturing method
    Patent number: 5977543
    Abstract: A method for manufacturing a transmission electron microscope analysis sample of a substrate containing an insulating body or an insulating sample includes the steps of: depositing a conductive material on the sample and then polishing the sample using a focused ion beam. The polishing step removes the conductive material from the analysis point of the sample, such that an electron projection and transmission path is formed through the sample at the analysis point. However, the conductive material is not removed from the remainder of the sample, not including the analysis point, thereby forming a ground path for any charges formed in the sample.
    Type: Grant
    Filed: August 8, 1997
    Date of Patent: November 2, 1999
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chan-kook Ihn, Chang-hyuk Ok, Chang-sub Lim