Patents by Inventor Chang-Sup Min

Chang-Sup Min has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Aqueous cleaning solution for integrated circuit device and method of cleaning using the cleaning solution
    Patent number: 7531491
    Abstract: Aqueous cleaning solutions are provided for cleaning an integrated circuit device formed on a wafer, as well as methods of cleaning a wafer using the aqueous cleaning solution. In one aspect, an aqueous cleaning solution includes a low foam surfactant, a metal corrosion inhibitor, an acidic pH control agent or an alkali pH control agent, and water.
    Type: Grant
    Filed: November 5, 2004
    Date of Patent: May 12, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chang-Sup Min, Sang-Jun Choi, Chang-Ki Hong
  • Aqueous cleaning solution for integrated circuit device and method of cleaning using the cleaning solution
    Publication number: 20050159322
    Abstract: Aqueous cleaning solutions are provided for cleaning an integrated circuit device formed on a wafer, as well as methods of cleaning a wafer using the aqueous cleaning solution. In one aspect, an aqueous cleaning solution includes a low foam surfactant, a metal corrosion inhibitor, an acidic pH control agent or an alkali pH control agent, and water.
    Type: Application
    Filed: November 5, 2004
    Publication date: July 21, 2005
    Inventors: Chang-Sup Min, Sang-Jun Choi, Chang-Ki Hong