Patents by Inventor Chang-Zong LIU
Chang-Zong LIU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11507067Abstract: A method is disclosed that includes the operations below: determining, by a processing unit, that arrival times of a lot arrived at N process stages are less than processing times of the lot predetermined to be processed at the N process stages, N being a positive integer; comparing, by the processing unit, idle times of multiple tools in the N process stages; and processing the lot with a first tool of the tools at each one of the N process stages, wherein the first tool of the tools has a shortest idle time.Type: GrantFiled: July 2, 2020Date of Patent: November 22, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Ren-Chyi You, An-Wei Peng, Chang-Zong Liu, Yuang-Tsung Chen
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Publication number: 20210089012Abstract: A system includes a dispatching system and at least one processor. The dispatching system is configured to provide dispatching preferences indicating that tools feedback preferences thereof for at least one lot. The processor is coupled to the dispatching system and at least one memory. Computer program code encoded in the memory is executed by the processor to cause the system to process the lot using at least one of the tools with utilization of a tool-lot relationship that is generated based on the dispatching preferences. A non-transitory computer readable medium and a method are also disclosed herein.Type: ApplicationFiled: December 6, 2020Publication date: March 25, 2021Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Ren-Chyi YOU, An-Wei PENG, Chang-Zong LIU, Jun-Sheng YEH
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Patent number: 10860008Abstract: A method is disclosed and includes generating a tool-lot relationship based on at least one process constraint and a dispatching rule which includes dispatching preferences for operating at least one lot; assigning the at least one lot to at least one tool by using the tool-lot relationship; and the at least one tool, assigned using the tool-lot relationship, processing the at least one lot by utilization of the tool-lot relationship to manufacture semiconductor devices on at least one wafer in the at least one lot.Type: GrantFiled: December 17, 2018Date of Patent: December 8, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Ren-Chyi You, An-Wei Peng, Chang-Zong Liu, Jun-Sheng Yeh
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Publication number: 20200333771Abstract: A method is disclosed that includes the operations below: determining, by a processing unit, that arrival times of a lot arrived at N process stages are less than processing times of the lot predetermined to be processed at the N process stages, N being a positive integer; comparing, by the processing unit, idle times of multiple tools in the N process stages; and processing the lot with a first tool of the tools at each one of the N process stages, wherein the first tool of the tools has a shortest idle time.Type: ApplicationFiled: July 2, 2020Publication date: October 22, 2020Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Ren-Chyi YOU, An-Wei PENG, Chang-Zong LIU, Yuang-Tsung CHEN
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Patent number: 10719067Abstract: A method is disclosed that includes the operations below: comparing an arrival time of a lot arrived at a process stage of N process stages with a processing time, determining whether one of tools at the process stage has a remain operation time which is equal to, or less than and closest to the arrival time, when a first tool of the tools has a first remain operation time which is equal to, or less than and closest to the arrival time, processing the lot with the first tool of the tools in the process stage after dispatching the lot to the processing stage, and generating at least one semiconductor device from the lot based on the comparing, determining and processing.Type: GrantFiled: April 22, 2019Date of Patent: July 21, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Ren-Chyi You, An-Wei Peng, Chang-Zong Liu, Yuang-Tsung Chen
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Publication number: 20190250594Abstract: A method is disclosed that includes the operations below: comparing an arrival time of a lot arrived at a process stage of N process stages with a processing time, determining whether one of tools at the process stage has a remain operation time which is equal to, or less than and closest to the arrival time, when a first tool of the tools has a first remain operation time which is equal to, or less than and closest to the arrival time, processing the lot with the first tool of the tools in the process stage after dispatching the lot to the processing stage, and generating at least one semiconductor device from the lot based on the comparing, determining and processing.Type: ApplicationFiled: April 22, 2019Publication date: August 15, 2019Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Ren-Chyi YOU, An-Wei PENG, Chang-Zong LIU, Yuang-Tsung CHEN
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Publication number: 20190137981Abstract: A method is disclosed and includes generating a tool-lot relationship based on at least one process constraint and a dispatching rule which includes dispatching preferences for operating at least one lot; assigning the at least one lot to at least one tool by using the tool-lot relationship; and the at least one tool, assigned using the tool-lot relationship, processing the at least one lot by utilization of the tool-lot relationship to manufacture semiconductor devices on at least one wafer in the at least one lot.Type: ApplicationFiled: December 17, 2018Publication date: May 9, 2019Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Ren-Chyi YOU, An-Wei PENG, Chang-Zong LIU, Jun-Sheng YEH
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Patent number: 10268186Abstract: A method is disclosed that includes the operations below. A lot is dispatched for N process stages of process stages, according to arrival durations of the lot arrived at the N process stages and process durations of the lot predetermined to be processed at the N process stages, in which N is a positive integer. A first tool of tools at each one of the N process stages are assigned for the lot, in which the lot is configured to be dispatched to the first tool at a first process stage of the N process stages according to a first arrival duration of the arrival durations of the lot arrived at the first process stage and remain operation durations of the tools at the first process stage.Type: GrantFiled: September 25, 2014Date of Patent: April 23, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Ren-Chyi You, An-Wei Peng, Chang-Zong Liu, Yuang-Tsung Chen
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Patent number: 10162340Abstract: A method is disclosed and includes determining whether there is any WIP information with one or more process constraints in a process constraint database that is coupled with a manufacturing execution system; determining whether there is a dispatching rule in the dispatching rule database that is coupled with a dispatching system; generating a tool-lot relationship based on at least one of the process constraints and the dispatching rule; utilizing the tool-lot relationship to assign one or more lots to one or more tools respectively.Type: GrantFiled: September 30, 2015Date of Patent: December 25, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Ren-Chyi You, An-Wei Peng, Chang-Zong Liu, Jun-Sheng Yeh
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Publication number: 20170090465Abstract: A method is disclosed and includes determining whether there is any WIP information with one or more process constraints in a process constraint database that is coupled with a manufacturing execution system; determining whether there is a dispatching rule in the dispatching rule database that is coupled with a dispatching system; generating a tool-lot relationship based on at least one of the process constraints and the dispatching rule; utilizing the tool-lot relationship to assign one or more lots to one or more tools respectively.Type: ApplicationFiled: September 30, 2015Publication date: March 30, 2017Inventors: Ren-Chyi YOU, An-Wei PENG, Chang-Zong LIU, Jun-Sheng YEH
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Publication number: 20160091891Abstract: A method is disclosed that includes the operations below. A lot is dispatched for N process stages of process stages, according to arrival durations of the lot arrived at the N process stages and process durations of the lot predetermined to be processed at the N process stages, in which N is a positive integer. A first tool of tools at each one of the N process stages are assigned for the lot, in which the lot is configured to be dispatched to the first tool at a first process stage of the N process stages according to a first arrival duration of the arrival durations of the lot arrived at the first process stage and remain operation durations of the tools at the first process stage.Type: ApplicationFiled: September 25, 2014Publication date: March 31, 2016Inventors: Ren-Chyi YOU, An-Wei PENG, Chang-Zong LIU, Yuang-Tsung CHEN