Patents by Inventor Changeun Jang

Changeun Jang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas storage cylinder, deposition system, and method of manufacturing semiconductor device
    Patent number: 10883173
    Abstract: A method of manufacturing a semiconductor device includes disposing a gas-storage cylinder storing monochlorosilane within a gas supply unit. The monochlorosilane is supplied from the gas-storage cylinder into a process chamber to form a silicon containing layer therein. The gas-storage cylinder includes manganese.
    Type: Grant
    Filed: November 26, 2018
    Date of Patent: January 5, 2021
    Assignee: SAMSUNG ELECTRONICS., LTD.
    Inventors: Yeonock Han, Wonwoong Chung, Keum Seok Park, Pankwi Park, Jeongho Yoo, Younjoung Cho, Byung Koo Kong, Mijeong Kim, Jin Wook Lee, Changeun Jang
  • GAS STORAGE CYLINDER, DEPOSITION SYSTEM, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    Publication number: 20190309415
    Abstract: A method of manufacturing a semiconductor device includes disposing a gas-storage cylinder storing monochlorosilane within a gas supply unit. The monochlorosilane is supplied from the gas-storage cylinder into a process chamber to form a silicon containing layer therein. The gas-storage cylinder includes manganese.
    Type: Application
    Filed: November 26, 2018
    Publication date: October 10, 2019
    Applicant: SK-MATERIALS CO., LTD.
    Inventors: Yeonock Han, Wonwoong Chung, Keum Seok Park, Pankwi Park, Jeongho Yoo, Younjoung Cho, Byung Koo Kong, Mijeong Kim, Jin Wook Lee, Changeun Jang