Abstract: A picometer optical comb and a device and a method for generating the same, wherein the picometer optical comb is a special grating with continuously variable widths of adjacent grating lines, wherein the width of each grating line is different from that of the adjacent grating line by a fixed difference in the magnitude of picometer to nanometer. The picometer optical comb provides a reference for picometer measurement. The picometer optical comb can generate a diffraction optical field distribution different from that of a traditional grating, which brings a new diffraction effect, achieves new diffraction optical functions, and provides tools such as picometer photolithography, picometer measurement, picometer imaging and the like. The picometer optical comb plays an important role in the fields of semiconductor photolithography, life science, interaction of light and substances in picometer scale.

Abstract: A picometer optical comb and a device and a method for generating the same, wherein the picometer optical comb is a special grating with continuously variable groove widths of adjacent grating lines, wherein the width of each grating groove is different from that of the adjacent grating groove by a fixed difference, such as ?d, which ranges from the magnitude of picometer to nanometer. The picometer optical comb provided by the present invention provides a reference for picometer measurement. The picometer optical comb can generate a diffraction optical field distribution different from that of a traditional grating, which brings a new diffraction effect, achieves new diffraction optical functions, and provides tools such as picometer photolithography, picometer measurement, picometer imaging and the like. The picometer optical comb plays an important role in the fields of semiconductor photolithography, life science, interaction of light and substances in picometer scale.