Patents by Inventor Changqing Xie

Changqing Xie has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240087628
    Abstract: A multi-resistance-state spintronic device, including: a top electrode and a bottom electrode respectively connected to a read-write circuit; and a magnetic tunnel junction between two electrodes. The magnetic tunnel junction includes from top to bottom: a ferromagnetic reference layer, a barrier tunneling layer, a ferromagnetic free layer, and a spin-orbit coupling layer. Nucleation centers are provided at two ends of the ferromagnetic free layer to generate a magnetic domain wall; the spin-orbit coupling layer is connected to the bottom electrode, and when a write pulse is applied, an electron spin current is generated and drives the magnetic domain wall through a spin-orbit torque to move; a plurality of local magnetic domain wall pinning centers are provided at an interface between the spin-orbit coupling layer and the ferromagnetic free layer to enhance a strength of a DM interaction constant between interfaces.
    Type: Application
    Filed: December 30, 2020
    Publication date: March 14, 2024
    Inventors: Guozhong XING, Huai LIN, Feng ZHANG, Di WANG, Long LIU, Changqing XIE, Ling LI, Ming LIU
  • Publication number: 20240071451
    Abstract: The three-state spintronic device includes: a bottom electrode, a magnetic tunnel junction and a top electrode from bottom to top. The magnetic tunnel junction includes: a spin-orbit coupling layer, a ferromagnetic free layer, a barrier tunneling layer, a ferromagnetic reference layer, three local magnetic domain wall pinning centers and domain wall nucleation centers. An antisymmetric exchange interaction is modulated, and the magnetic domain wall pinning centers are embedded in an interface between a heavy metal and the ferromagnetic free layer. The magnetic domain wall nucleation centers are at two ends of the ferromagnetic free layer. A current pulse flows through the spin-orbit coupling layer to generate a spin current and the spin current is injected into the ferromagnetic free layer. Under a control of all-electrical controlled, an effective field of a spin-orbit torque drives domain wall to move and displace.
    Type: Application
    Filed: January 21, 2021
    Publication date: February 29, 2024
    Inventors: Huai LIN, Guozhong XING, Zuheng WU, Long LIU, Di WANG, Cheng LU, Peiwen ZHANG, Changqing XIE, Ling LI, Ming LIU
  • Publication number: 20240005974
    Abstract: A self-reference storage structure includes: three transistors, including a first transistor T1, a second transistor T2, and a third transistor T3; and two magnetic tunnel junctions, including a first magnetic tunnel junction MTJ0 and a second magnetic tunnel junction MTJ1. The first magnetic tunnel junction MTJ0 is connected in series between the first transistor T1 and the second transistor T2, and the second magnetic tunnel junction MTJ1 is connected in series between the second transistor T2 and the third transistor T3. When the first transistor T1, the second transistor T2 and the third transistor T3 are turned on, one-bit binary information is written; and when data is stored, one-bit binary write can be implemented only by applying an unidirectional current pulse.
    Type: Application
    Filed: January 4, 2021
    Publication date: January 4, 2024
    Applicant: INSTITUTE OF MICROELECTRONICS OF THE CHINESE ACADEMY OF SCIENCES
    Inventors: Guozhong XING, Huai LIN, Yu LIU, Kaiping ZHANG, Kangwei ZHANG, Hangbing LV, Changqing XIE, Qi LIU, Ling LI, Ming LIU
  • Publication number: 20230337548
    Abstract: An SOT-driven field-free switching MRAM and an array thereof. From top to bottom, the SOT-MRAM sequentially includes: a selector (1) configured to turn on or turn off the SOT-MRAM under an action of an external voltage; a magnetic tunnel junction (2), including a ferromagnetic reference layer, a tunneling layer and a ferromagnetic free layer arranged sequentially from top to bottom; and a spin-orbit coupling layer (3) made of one or more selected from heavy metal, doped heavy metal, heavy metal alloy, metal oxide, dual heavy metal layers, semiconductor material, two-dimensional semi-metal material and anti-ferromagnetic material. The spin-orbit coupling layer is configured to generate an in-plane effective field in the ferromagnetic free layer by using the interlayer exchange coupling effect and generate spin-orbit torques by using the spin Hall effect, so as to perform a deterministic data storage in the magnetic tunnel junction (2).
    Type: Application
    Filed: August 20, 2020
    Publication date: October 19, 2023
    Inventors: Guozhong XING, Huai LIN, Yu LIU, Peiwen ZHANG, Changqing XIE, Ling LI, Ming LIU
  • Publication number: 20230280978
    Abstract: Provided are a spin orbit torque magnetic random access memory cell, a spin orbit torque magnetic random access memory array and a method for calculating a Hamming distance, wherein the spin orbit torque magnetic random access memory cell includes a magnetic tunnel junction; a first transistor, a drain terminal of the first transistor being connected to a bottom of the magnetic tunnel junction; and a second transistor, a drain terminal of the second transistor being connected to a top of the magnetic tunnel junction.
    Type: Application
    Filed: January 21, 2021
    Publication date: September 7, 2023
    Inventors: Guozhong XING, Huai LIN, Di WANG, Long LIU, Feng ZHANG, Changqing XIE, Ling LI, Ming LIU
  • Publication number: 20230263070
    Abstract: The present disclosure relates to a field of memory technical, and in particular to a magnetoresistive device, a method for changing a resistance state of the magnetoresistive device, and a synapse learning module. The magnetoresistive device includes a top electrode, a ferromagnetic reference layer, a tunneling layer, a ferromagnetic free layer, a spin-orbit coupling layer, and a bottom electrode that are arranged in sequence along a preset direction, where the spin-orbit coupling layer includes a first thickness region and a second thickness region distributed alternately, and a thickness of the first thickness region is different form a thickness of the second thickness region; and the ferromagnetic free layer includes a pinning region, and a position of the pinning region is in one-to-one correspondence with a position of the first thickness region.
    Type: Application
    Filed: December 31, 2020
    Publication date: August 17, 2023
    Inventors: Guozhong Xing, Di Wang, Huai Lin, Long Liu, Yu Liu, Hangbing Lv, Changqing Xie, Ling Li, Ming Liu
  • Publication number: 20220317338
    Abstract: The present disclosure provides a method for fabricating an anti-reflective layer on a quartz surface by using a metal-induced self-masking etching technique, comprising: performing reactive ion etching to a metal material and a quartz substrate by using a mixed gas containing a fluorine-based gas, wherein metal atoms and/or ions of the metal material are sputtered to a surface of the quartz substrate, to form a non-volatile metal fluoride on the surface of the quartz substrate; forming a micromask by a product of etching generated by reactive ion etching gathering around the non-volatile metal fluoride; and etching the micromask and the quartz substrate simultaneously, to form an anti-reflective layer having a sub-wavelength structure.
    Type: Application
    Filed: February 1, 2019
    Publication date: October 6, 2022
    Inventors: Lina SHI, Longjie LI, Kaiping ZHANG, Jiebin NIU, Changqing XIE, Ming LIU
  • Patent number: 10964529
    Abstract: The present disclosure provides a method for cleaning a lanthanum gallium silicate wafer which comprises the following steps: at a step of 1, a cleaning solution constituted of phosphorous acid, hydrogen peroxide and deionized water is utilized to clean the lanthanum gallium silicate wafer with a megahertz sound wave; at a step of 2, the cleaned lanthanum gallium silicate wafer is rinsed and dried by spinning; at a step of 3, a cleaning solution constituted of ammonia, hydrogen peroxide and deionized water is utilized to clean the lanthanum gallium silicate wafer with the megahertz sound wave; at a step of 4, the cleaned lanthanum gallium silicate wafer is rinsed and dried by spinning; and at a step of 5, the rinsed and dried wafer is placed in an oven to be baked.
    Type: Grant
    Filed: April 17, 2014
    Date of Patent: March 30, 2021
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Dongmei Li, Lei Zhou, Shengfa Liang, Xiaojing Li, Hao Zhang, Changqing Xie, Ming Liu
  • Patent number: 9762217
    Abstract: A sampler adapted to a one-dimension slow-varying signal, including: a signal preprocessing unit configured to preprocess an input signal; a slope-controllable sawtooth wave signal generating unit configured to generate a slope-controllable sawtooth wave signal and perform zero-resetting; a signal comparing unit configured to compare the preprocessed input signal from the signal preprocessing unit with the sawtooth wave signal and to output a pulse signal to the generating unit and a signal outputting unit when the preprocessed input signal is equal to the sawtooth wave signal; a counting unit configured to count a number of clock signals while the sawtooth wave signal generating unit is generating the sawtooth wave signal and to transmit the counted number to the signal outputting unit; the signal outputting unit configured to, upon receipt of the pulse signal output from the signal comparing unit, output the number counted by the counting unit at the moment.
    Type: Grant
    Filed: July 15, 2013
    Date of Patent: September 12, 2017
    Assignee: INSTITUTE OF MICROELECTRONICS CHINESE ACADEMY OF SCIENCES
    Inventors: Dongmei Li, Qing Luo, Shengfa Liang, Hongzhang Yang, Xiaojing Li, Hao Zhang, Changqing Xie, Ming Liu
  • Patent number: 9562884
    Abstract: A method for manufacturing an NO2 gas sensor for detection at room temperature comprises: manufacturing a metal electrode on a surface of a flexible substrate; manufacturing an SWCNTs/SnO2 sensitive film; and bonding the SWCNTs/SnO2 sensitive film with a portion of the surface of the flexible substrate with the metal electrode, so as to form the NO2 gas sensor for detection at room temperature. The present disclosure solves the problems of the poor adhesion between the sensitive material and the flexible substrate, and a non-uniform distribution, and achieves the purposes of secure bonding between the sensitive material and the flexible substrate, and uniform distribution.
    Type: Grant
    Filed: June 5, 2013
    Date of Patent: February 7, 2017
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Dongmei Li, Shuang Zhan, Shengfa Liang, Xin Chen, Changqing Xie, Ming Liu
  • Publication number: 20170018424
    Abstract: The present disclosure provides a method for cleaning a lanthanum gallium silicate wafer which comprises the following steps: at a step of 1, a cleaning solution constituted of phosphorous acid, hydrogen peroxide and deionized water is utilized to clean the lanthanum gallium silicate wafer with a megahertz sound wave; at a step of 2, the cleaned lanthanum gallium silicate wafer is rinsed and dried by spinning; at a step of 3, a cleaning solution constituted of ammonia, hydrogen peroxide and deionized water is utilized to clean the lanthanum gallium silicate wafer with the megahertz sound wave; at a step of 4, the cleaned lanthanum gallium silicate wafer is rinsed and dried by spinning; and at a step of 5, the rinsed and dried wafer is placed in an oven to be baked.
    Type: Application
    Filed: April 17, 2014
    Publication date: January 19, 2017
    Applicant: Institute of Microelectronics, Chinese Academy of
    Inventors: Dongmei Li, Lei Zhou, Shengfa Liang, Xiaojing Li, Hao Zhang, Changqing Xie, Ming Liu
  • Patent number: 9546964
    Abstract: A defect detection system for an extreme ultraviolet lithography mask comprises an extreme ultraviolet light source (1), extreme ultraviolet light transmission parts (2, 3), an extreme ultraviolet lithography mask (4), a photon sieve (6) and a collection (7) and analysis (8) system. Point light source beams emitted by the extreme ultraviolet light source (1) are focused on the extreme ultraviolet lithography mask (4) through the extreme ultraviolet light transmission parts (2, 3); the extreme ultraviolet lithography mask (4) emits scattered light and illuminates the photon sieve (6); and the photon sieve (6) forms a dark field image and transmits the same to the collection (7) and analysis (8) system. The defect detection system for the extreme ultraviolet photolithographic mask uses the photon sieve to replace a Schwarzchild objective, thereby realizing lower cost, relatively small size and high resolution.
    Type: Grant
    Filed: April 16, 2012
    Date of Patent: January 17, 2017
    Assignee: THE INSTITUTE OF MICROELECTRONICS OF CHINESE ACADEMY OF SCIENCES
    Inventors: Hailiang Li, Changqing Xie, Ming Liu, Dongmei Li, Jiebin Niu, Lina Shi, Xiaoli Zhu
  • Patent number: 9455741
    Abstract: A method for collecting a signal with a frequency lower than a Nyquist frequency includes, by a data transmitting end, selecting a suitable transformation base matrix for an input signal, deriving a sparse representation of the signal using the transformation base matrix to determine a sparsity of the signal, calculating a number M of compressive sampling operations according to the sparsity, sampling the signal with fNYQ/M using M channels, and integrating sampling values of each channel to obtain M measurement values. A reconstruction end reconstructs an original signal by solving optimization problems. Based on theory, compressive sampling can be performed on a sparse signal or a signal represented in a sparse manner with a frequency much lower than the Nyquist frequency, overcoming restrictions of the typical Nyquist sampling theorem. The method can be implemented simply and decrease pressure on data collection, storage, transmission and processing.
    Type: Grant
    Filed: July 22, 2015
    Date of Patent: September 27, 2016
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Dongmei Li, Xiaojing Li, Shengfa Liang, Hao Zhang, Qing Luo, Changqing Xie, Ming Liu
  • Patent number: 9442230
    Abstract: A method of manufacturing a sub-wavelength extreme ultraviolet metal transmission grating is disclosed. In one aspect, the method comprises forming a silicon nitride self-supporting film window on a back surface of a silicon-based substrate having both surfaces polished, then spin-coating a silicon nitride film on a front surface of the substrate with an electron beam resist HSQ. Then, performing electron beam direct writing exposure on the HSQ, developing and fixing to form a plurality of grating line patterns and a ring pattern surrounding the grating line patterns. Then depositing a chrome material on the front surface of the substrate through magnetron sputtering. Then, removing the chrome material inside the ring pattern. Then, growing a gold material on the front surface of the substrate through atomic layer deposition.
    Type: Grant
    Filed: December 30, 2013
    Date of Patent: September 13, 2016
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Hailiang Li, Changqing Xie, Ming Liu, Dongmei Li, Lina Shi, Xiaoli Zhu
  • Patent number: 9418843
    Abstract: The present disclosure provides a method for manufacturing ordered nanowires array of NiO doped with Pt in situ, comprising: growing a Ni layer on a high-temperature resistant and insulated substrate; applying a photoresist on the Ni layer, pattering a pattern region of the ordered nanowires array by applying electron beam etching on the photoresist, growing Ni on the pattern region of the ordered nanowires array, peeling off the photoresist by acetone and etching the surface of the Ni layer by ion beam etching so as to etch off the Ni layer grown on the surface of the substrate and to leave the Ni on the pattern region of the ordered nanowires array to form the ordered Ni nanowires array; dipping the ordered Ni nanowires array into a solution of H2PtCl6 so as to displace Pt on the Ni nanowires array by a displacement reaction; and oxidizing the Ni nanowires array attached with Pt in an oxidation oven to obtain the ordered nanowires array of NiO doped with Pt.
    Type: Grant
    Filed: January 17, 2013
    Date of Patent: August 16, 2016
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Dongmei Li, Xin Chen, Shengfa Liang, Jiebin Niu, Peiwen Zhang, Yu Liu, Xiaojing Li, Shuang Zhan, Hao Zhang, Qing Luo, Changqing Xie, Ming Liu
  • Publication number: 20160123944
    Abstract: A method for manufacturing an NO2 gas sensor for detection at room temperature comprises: manufacturing a metal electrode on a surface of a flexible substrate; manufacturing an SWCNTs/SnO2 sensitive film; and bonding the SWCNTs/SnO2 sensitive film with a portion of the surface of the flexible substrate with the metal electrode, so as to form the NO2 gas sensor for detection at room temperature. The present disclosure solves the problems of the poor adhesion between the sensitive material and the flexible substrate, and a non-uniform distribution, and achieves the purposes of secure bonding between the sensitive material and the flexible substrate, and uniform distribution.
    Type: Application
    Filed: June 5, 2013
    Publication date: May 5, 2016
    Inventors: Dongmei LI, Shuang ZHAN, Shengfa LIANG, Xin CHEN, Changqing XIE, Ming LIU
  • Publication number: 20160123943
    Abstract: A gas recognition method based on a compressive sensing theory. The method comprises: collecting compressed data in an under-sampling manner; performing a reconstruction on the collected compressed data to obtain reconstructed data; training a back-propagation neural network by using the reconstructed data and storing the trained back-propagation neural network; inputting data under test into the trained back-propagation neural network, such that the trained back-propagation neural network performs a recognition on the data under test to realize qualitative recognition of gas. The method solves the problem in transmission and storage of large amount of data and the problem of imprecise recognition in current gas detection, and achieves the object that a precise qualitative recognition is achieved by using a reduced amount of data.
    Type: Application
    Filed: June 5, 2013
    Publication date: May 5, 2016
    Inventors: Dongmei LI, Hao ZHANG, Shengfa LIANG, Qing LUO, Xiaojing LI, Changqing XIE, Ming LIU
  • Publication number: 20160079969
    Abstract: A sampler adapted to a one-dimension slow-varying signal, including: a signal preprocessing unit configured to preprocess an input signal; a slope-controllable sawtooth wave signal generating unit configured to generate a slope-controllable sawtooth wave signal and perform zero-resetting; a signal comparing unit configured to compare the preprocessed input signal from the signal preprocessing unit with the sawtooth wave signal and to output a pulse signal to the generating unit and a signal outputting unit when the preprocessed input signal is equal to the sawtooth wave signal; a counting unit configured to count a number of clock signals while the sawtooth wave signal generating unit is generating the sawtooth wave signal and to transmit the counted number to the signal outputting unit; the signal outputting unit configured to, upon receipt of the pulse signal output from the signal comparing unit, output the number counted by the counting unit at the moment.
    Type: Application
    Filed: July 15, 2013
    Publication date: March 17, 2016
    Inventors: Dongmei LI, Qing LUO, Shengfa LIANG, Hongzhang YANG, Xiaojing LI, Hao ZHANG, Changqing XIE, Ming LIU
  • Publication number: 20150357191
    Abstract: The present disclosure provides a method for manufacturing ordered nanowires array of NiO doped with Pt in situ, comprising: growing a Ni layer on a high-temperature resistant and insulated substrate; applying a photoresist on the Ni layer, pattering a pattern region of the ordered nanowires array by applying electron beam etching on the photoresist, growing Ni on the pattern region of the ordered nanowires array, peeling off the photoresist by acetone and etching the surface of the Ni layer by ion beam etching so as to etch off the Ni layer grown on the surface of the substrate and to leave the Ni on the pattern region of the ordered nanowires array to form the ordered Ni nanowires array; dipping the ordered Ni nanowires array into a solution of H2PtCl6 so as to displace Pt on the Ni nanowires array by a displacement reaction; and oxidizing the Ni nanowires array attached with Pt in an oxidation oven to obtain the ordered nanowires array of NiO doped with Pt.
    Type: Application
    Filed: January 17, 2013
    Publication date: December 10, 2015
    Inventors: Dongmei Li, Xin Chen, Shengfa Liang, Jiebin Niu, Peiwen Zhang, Yu Liu, Xiaojing Li, Shuang Zhan, Hao Zhang, Qing Luo, Changqing Xie, Ming Liu
  • Publication number: 20150325437
    Abstract: The present disclosure provides a method for preparing compound semiconductor sensitive film based on a displacement reaction-thermal oxidation method, the method comprising: growing a layer of Zn on a high temperature-resistant substrate; submerging the substrate on which the layer of Zn has been grown into ionic solution of soluble salt of Cu, such that Cu ions in the solution are displaced so as to separate Cu nano-particles out on a surface of the layer of Zn; and performing a thermal oxidation process on the layer of Zn to whose surface Cu nano-particles are adhered, such that the Cu nano-particles are oxidized into CuO nano-particles, so as to obtain a ZnO gas sensitive film that is doped with CuO nano-particles. The above preparing method has the following advantages: good filming quality, simplified preparation process, low cost and easy to control.
    Type: Application
    Filed: July 16, 2015
    Publication date: November 12, 2015
    Inventors: Dongmei LI, Xin CHEN, Shengfa LIANG, Shuang ZHAN, Peiwen ZHANG, Changqing XIE, Ming LIU