Patents by Inventor CHANG-WOO NOH

CHANG-WOO NOH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11911185
    Abstract: An apparatus for estimating bio-information may include: a bio-signal acquirer configured to acquire a bio-signal; and a processor configured to extract one or more first feature values from the bio-signal, determine a scale factor based on the first feature values, and to estimate bio-information based on the scale factor and the first feature values.
    Type: Grant
    Filed: February 18, 2022
    Date of Patent: February 27, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Chang Soon Park, Ui Kun Kwon, Yunseo Ku, Seung Woo Noh, Seung Keun Yoon, Dae Geun Jang
  • Patent number: 11742411
    Abstract: A semiconductor device according to an example embodiment includes a substrate extending in first and second directions intersecting with each other; nanowires on the substrate and spaced apart from each other in the second direction; gate electrodes extending in the first direction and spaced apart from each other in the second direction, and surrounding the nanowires to be superimposed vertically with the nanowires; external spacers on the substrate and covering sidewalls of the gate electrodes on the nanowires; and an isolation layer between the gate electrodes and extending in the first direction, wherein an upper surface of the isolation layer is flush with upper surfaces of the gate electrodes.
    Type: Grant
    Filed: April 7, 2021
    Date of Patent: August 29, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Chang-woo Noh, Myung-gil Kang, Ho-jun Kim, Geum-jong Bae, Dong-il Bae
  • Patent number: 11710741
    Abstract: Semiconductor devices are provided. The semiconductor devices may include a first wire pattern extending in a first direction on a substrate and a second wire pattern on the first wire pattern. The second wire pattern may be spaced apart from the first wire pattern and extends in the first direction. The semiconductor devices may also include a first gate structure at least partially surrounding the first wire pattern and the second wire pattern, a second gate structure spaced apart from the first gate structure in the first direction, a first source/drain region between the first gate structure and the second gate structure, a first spacer between a bottom surface of the first source/drain region and the substrate, a first source/drain contact on the first source/drain region, and a second spacer between the first source/drain contact and the first gate structure.
    Type: Grant
    Filed: April 29, 2021
    Date of Patent: July 25, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chang Woo Noh, Myung Gil Kang, Geum Jong Bae, Dong Il Bae, Jung Gil Yang, Sang Hoon Lee
  • Patent number: 11705503
    Abstract: A semiconductor device includes a substrate, a gate electrode on the substrate, a gate spacer on a sidewall of the gate electrode, an active pattern penetrating the gate electrode and the gate spacer, and an epitaxial pattern contacting the active pattern and the gate spacer. The gate electrode extends in a first direction. The gate spacer includes a semiconductor material layer. The active pattern extends in a second direction crossing the first direction.
    Type: Grant
    Filed: September 30, 2020
    Date of Patent: July 18, 2023
    Inventors: Jin Bum Kim, MunHyeon Kim, Hyoung Sub Kim, Tae Jin Park, Kwan Heum Lee, Chang Woo Noh, Maria Toledano Lu Que, Hong Bae Park, Si Hyung Lee, Sung Man Whang
  • Patent number: 11699728
    Abstract: A semiconductor device including a fin field effect transistor (fin-FET) includes active fins disposed on a substrate, isolation layers on both sides of the active fins, a gate structure formed to cross the active fins and the isolation layers, source/drain regions on the active fins on sidewalls of the gate structure, a first interlayer insulating layer on the isolation layers in contact with portions of the sidewalls of the gate structure and portions of surfaces of the source/drain regions, an etch stop layer configured to overlap the first interlayer insulating layer, the sidewalls of the gate structure, and the source/drain regions, and contact plugs formed to pass through the etch stop layer to contact the source/drain regions. The source/drain regions have main growth portions in contact with upper surfaces of the active fins.
    Type: Grant
    Filed: December 18, 2020
    Date of Patent: July 11, 2023
    Inventors: Chang Woo Noh, Seung Min Song, Geum Jong Bae, Dong Il Bae
  • Publication number: 20230197719
    Abstract: A semiconductor device may include first channels on a first region of a substrate and spaced apart from each other in a vertical direction substantially perpendicular to an upper surface of the substrate, second channels on a second region of the substrate and spaced apart from each other in the vertical direction, a first gate structure on the first region of the substrate and covering at least a portion of a surface of each of the first channels, and a second gate structure on the second region of the substrate and covering at least a portion of a surface of each of the second channels. The second channels may be disposed at heights substantially the same as those of corresponding ones of the first channels, and a height of a lowermost one of the second channels may be greater than a height of a lowermost one of the first channels.
    Type: Application
    Filed: February 13, 2023
    Publication date: June 22, 2023
    Inventors: Chang-Woo Noh, Jae-Hyeoung Ma, Dong-Il Bae
  • Patent number: 11581312
    Abstract: A semiconductor device may include first channels on a first region of a substrate and spaced apart from each other in a vertical direction substantially perpendicular to an upper surface of the substrate, second channels on a second region of the substrate and spaced apart from each other in the vertical direction, a first gate structure on the first region of the substrate and covering at least a portion of a surface of each of the first channels, and a second gate structure on the second region of the substrate and covering at least a portion of a surface of each of the second channels. The second channels may be disposed at heights substantially the same as those of corresponding ones of the first channels, and a height of a lowermost one of the second channels may be greater than a height of a lowermost one of the first channels.
    Type: Grant
    Filed: February 11, 2021
    Date of Patent: February 14, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Chang-Woo Noh, Jae-Hyeoung Ma, Dong-Îl Bae
  • Publication number: 20220085161
    Abstract: A semiconductor device includes a substrate, first to sixth nanowires extending in a first direction and spaced apart from each other, first to third gate electrodes extending in a second direction and respectively on first to third regions of the substrate, a first interface layer of a first thickness between the first gate electrode and the second nanowire, a second interface layer of a second thickness between the third gate electrode and the sixth nanowire. The first to third gate electrodes respectively may surround the first and second nanowires, third and fourth nanowires, and fifth and sixth nanowires. A first internal spacer may be on a side wall of at least one of the first to third gate electrodes. In the first direction, a first length of the first nanowire may be smaller than a second length of the third nanowire.
    Type: Application
    Filed: April 13, 2021
    Publication date: March 17, 2022
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Chang Woo NOH, Myung Gil KANG, Tae Young KIM, Geum Jong BAE, Keun Hwi CHO
  • Patent number: 11133383
    Abstract: A semiconductor device including a buried insulating layer on a substrate; a lower semiconductor layer on the buried insulating layer, the lower semiconductor layer including a first material; a channel pattern on the lower semiconductor layer, the channel pattern being spaced apart from the lower semiconductor layer and including a second material different from the first material; and a gate electrode surrounding at least a portion of the channel pattern.
    Type: Grant
    Filed: January 14, 2020
    Date of Patent: September 28, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Chang Woo Noh, Dong Il Bae, Geum Jong Bae
  • Publication number: 20210249413
    Abstract: Semiconductor devices are provided. The semiconductor devices may include a first wire pattern extending in a first direction on a substrate and a second wire pattern on the first wire pattern. The second wire pattern may be spaced apart from the first wire pattern and extends in the first direction. The semiconductor devices may also include a first gate structure at least partially surrounding the first wire pattern and the second wire pattern, a second gate structure spaced apart from the first gate structure in the first direction, a first source/drain region between the first gate structure and the second gate structure, a first spacer between a bottom surface of the first source/drain region and the substrate, a first source/drain contact on the first source/drain region, and a second spacer between the first source/drain contact and the first gate structure.
    Type: Application
    Filed: April 29, 2021
    Publication date: August 12, 2021
    Inventors: CHANG WOO NOH, MYUNG GIL KANG, GEUM JONG BAE, DONG IL BAE, JUNG GIL YANG, SANG HOON LEE
  • Publication number: 20210225648
    Abstract: A semiconductor device according to an example embodiment includes a substrate extending in first and second directions intersecting with each other; nanowires on the substrate and spaced apart from each other in the second direction; gate electrodes extending in the first direction and spaced apart from each other in the second direction, and surrounding the nanowires to be superimposed vertically with the nanowires; external spacers on the substrate and covering sidewalls of the gate electrodes on the nanowires; and an isolation layer between the gate electrodes and extending in the first direction, wherein an upper surface of the isolation layer is flush with upper surfaces of the gate electrodes.
    Type: Application
    Filed: April 7, 2021
    Publication date: July 22, 2021
    Inventors: Chang-woo NOH, Myung-gil KANG, Ho-jun KIM, Geum-jong BAE, Dong-il BAE
  • Publication number: 20210167064
    Abstract: A semiconductor device may include first channels on a first region of a substrate and spaced apart from each other in a vertical direction substantially perpendicular to an upper surface of the substrate, second channels on a second region of the substrate and spaced apart from each other in the vertical direction, a first gate structure on the first region of the substrate and covering at least a portion of a surface of each of the first channels, and a second gate structure on the second region of the substrate and covering at least a portion of a surface of each of the second channels. The second channels may be disposed at heights substantially the same as those of corresponding ones of the first channels, and a height of a lowermost one of the second channels may be greater than a height of a lowermost one of the first channels.
    Type: Application
    Filed: February 11, 2021
    Publication date: June 3, 2021
    Inventors: CHANG-WOO NOH, JAE-HYEOUNG MA, DONG-IL BAE
  • Patent number: 11024628
    Abstract: Semiconductor devices are provided. The semiconductor devices may include a first wire pattern extending in a first direction on a substrate and a second wire pattern on the first wire pattern. The second wire pattern may be spaced apart from the first wire pattern and extends in the first direction. The semiconductor devices may also include a first gate structure at least partially surrounding the first wire pattern and the second wire pattern, a second gate structure spaced apart from the first gate structure in the first direction, a first source/drain region between the first gate structure and the second gate structure, a first spacer between a bottom surface of the first source/drain region and the substrate, a first source/drain contact on the first source/drain region, and a second spacer between the first source/drain contact and the first gate structure.
    Type: Grant
    Filed: May 7, 2019
    Date of Patent: June 1, 2021
    Inventors: Chang Woo Noh, Myung Gil Kang, Geum Jong Bae, Dong Il Bae, Jung Gil Yang, Sang Hoon Lee
  • Patent number: 10978299
    Abstract: A semiconductor device according to an example embodiment includes a substrate extending in first and second directions intersecting with each other; nanowires on the substrate and spaced apart from each other in the second direction; gate electrodes extending in the first direction and spaced apart from each other in the second direction, and surrounding the nanowires to be superimposed vertically with the nanowires; external spacers on the substrate and covering sidewalls of the gate electrodes on the nanowires; and an isolation layer between the gate electrodes and extending in the first direction, wherein an upper surface of the isolation layer is flush with upper surfaces of the gate electrodes.
    Type: Grant
    Filed: March 22, 2019
    Date of Patent: April 13, 2021
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chang-woo Noh, Myung-gil Kang, Ho-jun Kim, Geum-jong Bae, Dong-il Bae
  • Publication number: 20210104613
    Abstract: A semiconductor device including a fin field effect transistor (fin-FET) includes active fins disposed on a substrate, isolation layers on both sides of the active fins, a gate structure formed to cross the active fins and the isolation layers, source/drain regions on the active fins on sidewalls of the gate structure, a first interlayer insulating layer on the isolation layers in contact with portions of the sidewalls of the gate structure and portions of surfaces of the source/drain regions, an etch stop layer configured to overlap the first interlayer insulating layer, the sidewalls of the gate structure, and the source/drain regions, and contact plugs formed to pass through the etch stop layer to contact the source/drain regions. The source/drain regions have main growth portions in contact with upper surfaces of the active fins.
    Type: Application
    Filed: December 18, 2020
    Publication date: April 8, 2021
    Inventors: Chang Woo NOH, Seung Min SONG, Geum Jong BAE, Dong Il BAE
  • Patent number: 10937787
    Abstract: A semiconductor device may include first channels on a first region of a substrate and spaced apart from each other in a vertical direction substantially perpendicular to an upper surface of the substrate, second channels on a second region of the substrate and spaced apart from each other in the vertical direction, a first gate structure on the first region of the substrate and covering at least a portion of a surface of each of the first channels, and a second gate structure on the second region of the substrate and covering at least a portion of a surface of each of the second channels. The second channels may be disposed at heights substantially the same as those of corresponding ones of the first channels, and a height of a lowermost one of the second channels may be greater than a height of a lowermost one of the first channels.
    Type: Grant
    Filed: March 15, 2019
    Date of Patent: March 2, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Chang-Woo Noh, Jae-Hyeoung Ma, Dong-Il Bae
  • Patent number: 10903324
    Abstract: A semiconductor device including a fin field effect transistor (fin-FET) includes active fins disposed on a substrate, isolation layers on both sides of the active fins, a gate structure formed to cross the active fins and the isolation layers, source/drain regions on the active fins on sidewalls of the gate structure, a first interlayer insulating layer on the isolation layers in contact with portions of the sidewalls of the gate structure and portions of surfaces of the source/drain regions, an etch stop layer configured to overlap the first interlayer insulating layer, the sidewalls of the gate structure, and the source/drain regions, and contact plugs formed to pass through the etch stop layer to contact the source/drain regions. The source/drain regions have main growth portions in contact with upper surfaces of the active fins.
    Type: Grant
    Filed: November 30, 2018
    Date of Patent: January 26, 2021
    Inventors: Chang Woo Noh, Seung Min Song, Geum Jong Bae, Dong Il Bae
  • Publication number: 20210013324
    Abstract: A semiconductor device includes a substrate, a gate electrode on the substrate, a gate spacer on a sidewall of the gate electrode, an active pattern penetrating the gate electrode and the gate spacer, and an epitaxial pattern contacting the active pattern and the gate spacer. The gate electrode extends in a first direction. The gate spacer includes a semiconductor material layer. The active pattern extends in a second direction crossing the first direction.
    Type: Application
    Filed: September 30, 2020
    Publication date: January 14, 2021
    Inventors: Jin Bum KIM, MunHyeon KIM, Hyoung Sub KIM, Tae Jin PARK, Kwan Heum LEE, Chang Woo NOH, Maria TOLEDANO LU QUE, Hong Bae PARK, Si Hyung LEE, Sung Man WHANG
  • Publication number: 20200411641
    Abstract: A semiconductor device including a buried insulating layer on a substrate; a lower semiconductor layer on the buried insulating layer, the lower semiconductor layer including a first material; a channel pattern on the lower semiconductor layer, the channel pattern being spaced apart from the lower semiconductor layer and including a second material different from the first material; and a gate electrode surrounding at least a portion of the channel pattern.
    Type: Application
    Filed: January 14, 2020
    Publication date: December 31, 2020
    Inventors: Chang Woo NOH, Dong Il BAE, Geum Jong BAE
  • Publication number: 20200091152
    Abstract: Semiconductor devices are provided. The semiconductor devices may include a first wire pattern extending in a first direction on a substrate and a second wire pattern on the first wire pattern. The second wire pattern may be spaced apart from the first wire pattern and extends in the first direction. The semiconductor devices may also include a first gate structure at least partially surrounding the first wire pattern and the second wire pattern, a second gate structure spaced apart from the first gate structure in the first direction, a first source/drain region between the first gate structure and the second gate structure, a first spacer between a bottom surface of the first source/drain region and the substrate, a first source/drain contact on the first source/drain region, and a second spacer between the first source/drain contact and the first gate structure.
    Type: Application
    Filed: May 7, 2019
    Publication date: March 19, 2020
    Inventors: Chang Woo Noh, Myung Gil Kang, Geum Jong Bae, Dong Il Bae, Jung Gil Yang, Sang Hoon Lee