Abstract: A wafer processing tool is capable of detecting wafer warpage. The wafer processing tool includes a wafer holder on which a wafer is held and at least one sensor set. The at least one sensor set is disposed above the wafer or under the wafer, and a projection of each of the at least one sensor set on the wafer radially extending from a center of the wafer to an edge of the wafer. The at least one sensor set is configured to scan an entire surface of the wafer so as to measure warpage of the wafer while the wafer holder and the at least one sensor set are rotatable relative to each other.

Abstract: A wafer processing tool is capable of detecting wafer warpage. The wafer processing tool includes a wafer holder on which a wafer is held and at least one sensor set. The at least one sensor set is disposed above the wafer or under the wafer, and a projection of each of the at least one sensor set on the wafer radially extending from a center of the wafer to an edge of the wafer. The at least one sensor set is configured to scan an entire surface of the wafer so as to measure warpage of the wafer while the wafer holder and the at least one sensor set are rotatable relative to each other.

Abstract: A computer device is provided with a remote control signal reception module, and is provided with a wireless peripheral that is equipped with a remote control switch and a power switch remote control signal generator. The remote control signal reception module in the computer is adapted to receive a power switch remote control signal from the power switch remote control signal generator of the wireless peripheral and uses the received power switch remote control signal to control the power supply condition of a power supply device of the computer. The power switch remote control signal generator may be otherwise provided on an independent wireless remote control unit.

Abstract: A water supply system for supplying water by condensing air humidity is disclosed. The water supply system is provided with a housing adapted to be mounted on a building. An air humidity condensing system is mounted in the housing to condense air humidity to water. A water collector is arranged below the air humidity condensing system for collecting the water collected by the air humidity condensing system. A water-storage tank is used to storage the water and then supply the water via distributing ducts to the building. A solar collector panel is further supported over the housing to supply electric energy by converting solar energy.