Patents by Inventor Chao-Pei Lu

Chao-Pei Lu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for improving exposure performance and apparatus thereof
    Patent number: 11221564
    Abstract: A method of operating an illuminator and apparatus thereof are proposed. A method includes: directing a radiation beam to the illuminator comprising slit fingers; sensing a temperature value of each of the slit fingers; determining a shifting value of the respective slit finger based on the temperature value; causing the respective slit finger to move according to the shifting value to form a light slit from the radiation beam; and exposing a workpiece using the light slit.
    Type: Grant
    Filed: May 2, 2019
    Date of Patent: January 11, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chao Pei Lu, Yung-Yao Lee
  • METHOD FOR IMPROVING EXPOSURE PERFORMANCE AND APPARATUS THEREOF
    Publication number: 20200133142
    Abstract: A method of operating an illuminator and apparatus thereof are proposed. A method includes: directing a radiation beam to the illuminator comprising slit fingers; sensing a temperature value of each of the slit fingers; determining a shifting value of the respective slit finger based on the temperature value; causing the respective slit finger to move according to the shifting value to form a light slit from the radiation beam; and exposing a workpiece using the light slit.
    Type: Application
    Filed: May 2, 2019
    Publication date: April 30, 2020
    Inventors: CHAO PEI LU, YUNG-YAO LEE
  • Method for controlling read velocity in a disk device
    Patent number: 7512865
    Abstract: A method for controlling read velocity in a disk device is provided. When reading data on the disc, the method first reads each SYNC of blocks to form an ECC code, read data to decode, and checks and corrects decoded data to generate decoded errors. The type of decoded errors are classified and counted to form reference parameters of a rule base. A fuzzy engine checks if the counting number exceeds the threshold of the parameter, and executes the operation of the rule to control read velocity and enhance the data transfer rate in the disk device.
    Type: Grant
    Filed: March 31, 2006
    Date of Patent: March 31, 2009
    Assignee: Quanta Storage Inc.
    Inventor: Chao-Pei Lu
  • METHOD FOR CONTROLLING READ VELOCITY IN A DISK DEVICE
    Publication number: 20060233056
    Abstract: A method for controlling read velocity in a disk device is provided. When reading data on the disc, the method first reads each SYNC of blocks to form an ECC code, read data to decode, and checks and corrects decoded data to generate decoded errors. The type of decoded errors are classified and counted to form reference parameters of a rule base. A fuzzy engine checks if the counting number exceeds the threshold of the parameter, and executes the operation of the rule to control read velocity and enhance the data transfer rate in the disk device.
    Type: Application
    Filed: March 31, 2006
    Publication date: October 19, 2006
    Inventor: Chao-Pei Lu