Patents by Inventor Chao-Shuo CHEN
Chao-Shuo CHEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240312990Abstract: A semiconductor device with an isolation structure and a method of fabricating the same are disclosed. The semiconductor device includes first and second fin structures disposed on a substrate and first and second pairs of gate structures disposed on the first and second fin structures. The first end surfaces of the first pair of gate structures face second end surfaces of the second pair of gate structure. The first and second end surfaces of the first and second pair of gate structures are in physical contact with first and second sidewalls of the isolation structure, respectively. The semiconductor device further includes an isolation structure interposed between the first and second pairs of gate structures. An aspect ratio of the isolation structure is smaller than a combined aspect ratio of the first pair of gate structures.Type: ApplicationFiled: May 29, 2024Publication date: September 19, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chao-Shuo CHEN, Chia-Der Chang, Yi-Jing Lee
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Patent number: 12057449Abstract: A semiconductor device with an isolation structure and a method of fabricating the same are disclosed. The semiconductor device includes first and second fin structures disposed on a substrate and first and second pairs of gate structures disposed on the first and second fin structures. The first end surfaces of the first pair of gate structures face second end surfaces of the second pair of gate structure. The first and second end surfaces of the first and second pair of gate structures are in physical contact with first and second sidewalls of the isolation structure, respectively. The semiconductor device further includes an isolation structure interposed between the first and second pairs of gate structures. An aspect ratio of the isolation structure is smaller than a combined aspect ratio of the first pair of gate structures.Type: GrantFiled: July 29, 2022Date of Patent: August 6, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chao-Shuo Chen, Chia-Der Chang, Yi-Jing Lee
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Patent number: 11664423Abstract: The present disclosure describes a semiconductor structure and a method for forming the same. The semiconductor structure can include a substrate, an insulating stack formed over the substrate, a vertical structure formed through the insulating stack, a source/drain region formed over the vertical structure, and an isolation structure formed adjacent to the source/drain region and protruding the insulating stack. The source/drain region can include a first side surface and a second side surface. A lateral separation between the first side surface and the vertical structure can be greater than an other lateral separation between the second side surface and the vertical structure.Type: GrantFiled: August 18, 2020Date of Patent: May 30, 2023Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chao-Shuo Chen, Chia-Der Chang, Yi-Jing Lee
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Patent number: 11521969Abstract: A semiconductor device with an isolation structure and a method of fabricating the same are disclosed. The semiconductor device includes first and second fin structures disposed on a substrate and first and second pairs of gate structures disposed on the first and second fin structures. The first end surfaces of the first pair of gate structures face second end surfaces of the second pair of gate structure. The first and second end surfaces of the first and second pair of gate structures are in physical contact with first and second sidewalls of the isolation structure, respectively. The semiconductor device further includes an isolation structure interposed between the first and second pairs of gate structures. An aspect ratio of the isolation structure is smaller than a combined aspect ratio of the first pair of gate structures.Type: GrantFiled: July 23, 2020Date of Patent: December 6, 2022Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chao-Shuo Chen, Chia-Der Chang, Yi-Jing Lee
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Publication number: 20220367633Abstract: The present disclosure describes a semiconductor structure and a method for forming the same. The semiconductor structure can include a substrate, an insulating stack formed over the substrate, a vertical structure formed through the insulating stack, a source/drain region formed over the vertical structure, and an isolation structure formed adjacent to the source/drain region and protruding the insulating stack. The source/drain region can include a first side surface and a second side surface. A lateral separation between the first side surface and the vertical structure can be greater than an other lateral separation between the second side surface and the vertical structure.Type: ApplicationFiled: July 26, 2022Publication date: November 17, 2022Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chao-Shuo CHEN, Chia-Der CHANG, Yi-Jing LEE
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Publication number: 20220367456Abstract: A semiconductor device with an isolation structure and a method of fabricating the same are disclosed. The semiconductor device includes first and second fin structures disposed on a substrate and first and second pairs of gate structures disposed on the first and second fin structures. The first end surfaces of the first pair of gate structures face second end surfaces of the second pair of gate structure. The first and second end surfaces of the first and second pair of gate structures are in physical contact with first and second sidewalls of the isolation structure, respectively. The semiconductor device further includes an isolation structure interposed between the first and second pairs of gate structures. An aspect ratio of the isolation structure is smaller than a combined aspect ratio of the first pair of gate structures.Type: ApplicationFiled: July 29, 2022Publication date: November 17, 2022Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chao-Shuo CHEN, Chia-Der CHANG, Yi-Jing LEE
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Publication number: 20220059653Abstract: The present disclosure describes a semiconductor structure and a method for forming the same. The semiconductor structure can include a substrate, an insulating stack formed over the substrate, a vertical structure formed through the insulating stack, a source/drain region formed over the vertical structure, and an isolation structure formed adjacent to the source/drain region and protruding the insulating stack. The source/drain region can include a first side surface and a second side surface. A lateral separation between the first side surface and the vertical structure can be greater than an other lateral separation between the second side surface and the vertical structure.Type: ApplicationFiled: August 18, 2020Publication date: February 24, 2022Applicant: Taian Semiconductor Manufacturing Co., Ltd.Inventors: Chao-Shuo CHEN, Chia-Der Chang, Yi-Jing Lee
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Publication number: 20210233906Abstract: A semiconductor device with an isolation structure and a method of fabricating the same are disclosed. The semiconductor device includes first and second fin structures disposed on a substrate and first and second pairs of gate structures disposed on the first and second fin structures. The first end surfaces of the first pair of gate structures face second end surfaces of the second pair of gate structure. The first and second end surfaces of the first and second pair of gate structures are in physical contact with first and second sidewalls of the isolation structure, respectively. The semiconductor device further includes an isolation structure interposed between the first and second pairs of gate structures. An aspect ratio of the isolation structure is smaller than a combined aspect ratio of the first pair of gate structures.Type: ApplicationFiled: July 23, 2020Publication date: July 29, 2021Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chao-Shuo CHEN, Chia-Der CHANG, Yi-Jing LEE