Abstract: A defect inspection method and a defect inspection system are provided. In the method, a plurality of candidate defect images are retrieved from inspection images obtained by at least one optical inspection tool performing hot scans on at least one wafer and a plurality of attributes are extracted from the inspection images. A random forest classifier including a plurality of decision trees for classifying the candidate defect images is created, wherein the decision trees are built with different subset of the attributes and the candidate defect images. A plurality of candidate defect images are retrieved from the optical inspection tool in runtime and applied to the decision trees, and classified into nuisance images and real defect images according to votes of the decision trees in which the nuisance images are filtered out. The real defect images with the votes over a confidence value are sampled for microscopic review.

Abstract: A defect inspection method and a defect inspection system are provided. In the method, a plurality of candidate defect images are retrieved from inspection images obtained by at least one optical inspection tool performing hot scans on at least one wafer and a plurality of attributes are extracted from the inspection images. A random forest classifier including a plurality of decision trees for classifying the candidate defect images is created, wherein the decision trees are built with different subset of the attributes and the candidate defect images. A plurality of candidate defect images are retrieved from the optical inspection tool in runtime and applied to the decision trees, and classified into nuisance images and real defect images according to votes of the decision trees in which the nuisance images are filtered out. The real defect images with the votes over a confidence value are sampled for microscopic review.

Abstract: An alarm chain based monitoring device includes an alarm chain module, which is in information connection with at least one photographing device and at least one display element in information connection with the photographing device. The alarm chain module includes a definition unit, a sensitivity unit, and an alarming unit. The photographing device generates an image that is then displayed by the display element. The definition unit generates an alarm chain that includes control nodes and can be curved in the image. The sensitivity unit defines detection sensitivity of the alarm chain. When an object moves across the alarm chain, the alarming unit issues at least one alarm message, whereby the curved alarm chain defined in the image allows the installation site not be subjected to constraint and reduces error triggering rate.