Abstract: The invention claims a microscopic imaging method of phase contrast (PC) and differential interference contrast (DIC) based on the transport of intensity equation (TIE). Firstly, three intensity images are captured along the optical axis; secondly, TIE is solved by deconvolution to obtain the quantitative phase; then, the intensity image under the DIC imaging mode is obtained according to the DIC imaging principle; finally, the corresponding phase image of PC imaging mode is obtained according to the PC imaging principle. The proposed approach can endow the bright-field microscope with the ability to realize PC and DIC imaging without complex modification of the traditional bright-field microscope. In other words, this method only needs to use the traditional bright-field microscope without adding any complex hardware. Through the PC and DIC algorithms, this method has the advantages of quantitative, high-speed, low-cost, simple structure, and less external interference.

Abstract: The present invention discloses a three-dimensional diffraction tomography microscopy imaging method based on LED array coded illumination. Firstly, acquiring the raw intensity images, three sets of intensity image stacks are acquired at different out-of-focus positions by moving the stage or using electrically tunable lens. And then, after acquiring the intensity image stacks of the object to be measured at different out-of-focus positions, the three-dimensional phase transfer function of the microscopy imaging system with arbitrary shape illumination is derived. Further, the three-dimensional phase transfer function of the microscopic system under circular and annular illumination with different coherence coefficients is obtained as well, and the three-dimensional quantitative refractive index is reconstructed by inverse Fourier transform of the three-dimensional scattering potential function. The scattering potential function is converted into the refractive index distribution.

Abstract: The invention discloses a deep learning-based temporal phase unwrapping method for fringe projection profilometry. First, four sets of three-step phase-shifting fringe patterns with different frequencies (including 1, 8, 32, and 64) are projected to the tested objects. The three-step phase-shifting fringe images acquired by the camera are processed to obtain the wrapped phase map using a three-step phase-shifting algorithm. Then, a multi-frequency temporal phase unwrapping (MF-TPU) algorithm is used to unwrap the wrapped phase map to obtain a fringe order map of the high-frequency phase with 64 periods. A residual convolutional neural network is built, and its input data are set to be the wrapped phase maps with frequencies of 1 and 64, and the output data are set to be the fringe order map of the high-frequency phase with 64 periods. Finally, the training dataset and the validation dataset are built to train and validate the network.

Abstract: A high-illumination numerical aperture-based large field-of-view high-resolution microimaging device, and a method for iterative reconstruction, the device comprising an LED array (1), a stage (2), a condenser (3), a microscopic objective (5), a tube lens (6), and a camera (7), the LED array (1) being arranged on the forward focal plane of the condenser (3). Light emitted by the i-th lit LED unit (8) of the LED array (1) passes through the condenser (3) and converges to become parallel light illuminating a specimen (4) to be examined, which is placed on the stage (2); part of the diffracted light passing through the specimen (4) is collected by the microscopic objective (5), converged by the tube lens (6), and reaches the imaging plane of the camera (7), forming an intensity image recorded by the camera (1). The present device and method ensure controllable programming of the illumination direction, while also ensuring an illumination-numerical-aperture up to 1.

Abstract: The patent discloses a differential phase contrast (DPC) quantitative phase microscopy method based on the optimal illumination pattern design. Firstly, the optimal illumination pattern corresponding to the isotropic phase transfer function of DPC quantitative phase imaging is derived, which is determined as a semi-annular illumination pattern with the illumination numerical aperture NAill equal to the numerical aperture NAobj of the objective lens. The illumination intensity distribution varies with the cosine of the illumination angle, and it can be expressed as S(?)=cos(?). This patent effectively compensates for the frequency loss of phase transfer, not only the high-frequency responses of PTF are enhanced, but also the transfer responses of low-frequency phase information is significantly improved.

Abstract: An annular-irradiation high-resolution quantitative phase microimaging based on light intensity transfer equation is proposed here includes designing an annular aperture for the imaging system illumination; invoking the weak object approximation by using the parameters of annular illumination aperture and bright field microscopy to calculate a weak object optical transfer function (WOTF) on the basis of a partially coherent imaging theory; and collecting three intensity images by a camera and obtaining the quantitative phase image of object by resolving the light intensity transfer equation with a deconvolution algorithm.

Abstract: A data processing method includes: generating a service serial number for a target service according to a preset naming rule; obtaining service data of the target service; obtaining a target data table from a plurality of pre-configured data tables, according to the service serial number; and storing the service data to the target data table.

Abstract: A super-rapid three-dimensional measurement method and system based on an improved Fourier transform contour technique is disclosed.

Abstract: A high-illumination numerical aperture-based large field-of-view high-resolution microimaging device, and a method for iterative reconstruction, the device comprising an LED array (1), a stage (2), a condenser (3), a microscopic objective (5), a tube lens (6), and a camera (7), the LED array (1) being arranged on the forward focal plane of the condenser (3). Light emitted by the i-th lit LED unit (8) of the LED array (1) passes through the condenser (3) and converges to become parallel light illuminating a specimen (4) to be examined, which is placed on the stage (2); part of the diffracted light passing through the specimen (4) is collected by the microscopic objective (5), converged by the tube lens (6), and reaches the imaging plane of the camera (7), forming an intensity image recorded by the camera (1). The present device and method ensure controllable programming of the illumination direction, while also ensuring an illumination-numerical-aperture up to 1.

Abstract: Annular-irradiation high-resolution quantitative phase microimaging based on light intensity transfer equation is proposed here. First, an annular aperture is designed for the imaging system illumination. And then, by invoking the weak object approximation, the parameters of annular illumination aperture and bright field microscopy are used to calculate a weak object optical transfer function (WOTF) on the basis of a partially coherent imaging theory. Finally, three intensity images are collected by a camera and the quantitative phase image of object is obtained by resolving the light intensity transfer equation with a deconvolution algorithm. The present method effectively resolves the tradeoff between the cloudy low-frequency noise and high-frequency fuzziness in the light intensity transfer equation, and the spatial imaging resolution of phase reconstruction is greatly increased.

Abstract: A super-rapid three-dimensional measurement method and system based on an improved Fourier transform contour technique is disclosed.

Abstract: A highly efficient three-dimensional image acquisition method based on multi-mode composite encoding and epipolar constraint, respectively using a fast imaging mode or a high-precision imaging mode, wherein in the fast imaging mode, two phase maps having different frequencies are obtained by four stripe gratings, and a high-frequency absolute phase is obtained by means of the epipolar constraint and a left-right consistency check, and the three-dimensional image is obtained by means of a mapping relationship between the phase and three-dimensional coordinates; and in the high precision imaging mode, two phases having different frequencies are obtained by means of N+2 stripe gratings, a low-frequency absolute phase is obtained by the epipolar constraint, and the unwrapping of a high-frequency phase is assisted by means of the low-frequency absolute phase, so as to obtain the high-frequency absolute phase, and finally, the three-dimensional image is obtained by the mapping relationship between the phase and the

Abstract: The invention discloses a programmable annular LED illumination-based high efficiency quantitative phase microscopy imaging method, the proposed method comprising the following steps: the derivation of system optical transfer function in a partially coherent illumination imaging system; the derivation of phase transfer function with the weak object approximation under the illumination of tilted axially symmetric coherent point illumination source; the extension of illumination from an axially symmetric coherence point source to a discrete annular point source, and the optical transfer function can be treated as an incoherent superposition of each pair of tilted axially symmetric coherent point sources. The acquisition of raw intensity dataset; the implementation of deconvolution for quantitative phase reconstruction.

Abstract: A highly efficient three-dimensional image acquisition method based on multi-mode composite encoding and epipolar constraint, respectively using a fast imaging mode or a high-precision imaging mode, wherein in the fast imaging mode, two phase maps having different frequencies are obtained by four stripe gratings, and a high-frequency absolute phase is obtained by means of the epipolar constraint and a left-right consistency check, and the three-dimensional image is obtained by means of a mapping relationship between the phase and three-dimensional coordinates; and in the high precision imaging mode, two phases having different frequencies are obtained by means of N+2 stripe gratings, a low-frequency absolute phase is obtained by the epipolar constraint, and the unwrapping of a high-frequency phase is assisted by means of the low-frequency absolute phase, so as to obtain the high-frequency absolute phase, and finally, the three-dimensional image is obtained by the mapping relationship between the phase and the

Abstract: Disclosed examples provide processes for fabricating a semiconductor product and for forming a patterned stack with an aluminum layer and a tungsten layer, including forming a first dielectric layer on a gate structure and on first and second regions of a substrate, forming a diffusion barrier layer on the first dielectric layer, forming a tungsten layer on the diffusion barrier layer, forming an aluminum layer on the tungsten layer, forming a hard mask on the aluminum layer, forming a patterned resist mask which covers the hard mask above the first region and exposes the hard mask layer above the second region, dry etching the hard mask and the aluminum layer above the second region using the patterned resist mask layer, removing the resist mask, and dry etching the tungsten layer using the hard mask layer to expose the first dielectric layer above the second region.

Abstract: Disclosed examples provide processes for fabricating a semiconductor product and for forming a patterned stack with an aluminum layer and a tungsten layer, including forming a first dielectric layer on a gate structure and on first and second regions of a substrate, forming a diffusion barrier layer on the first dielectric layer, forming a tungsten layer on the diffusion barrier layer, forming an aluminum layer on the tungsten layer, forming a hard mask on the aluminum layer, forming a patterned resist mask which covers the hard mask above the first region and exposes the hard mask layer above the second region, dry etching the hard mask and the aluminum layer above the second region using the patterned resist mask layer, removing the resist mask, and dry etching the tungsten layer using the hard mask layer to expose the first dielectric layer above the second region.

Abstract: Disclosed examples provide processes for fabricating a semiconductor product and for forming a patterned stack with an aluminum layer and a tungsten layer, including forming a first dielectric layer on a gate structure and on first and second regions of a substrate, forming a diffusion barrier layer on the first dielectric layer, forming a tungsten layer on the diffusion barrier layer, forming an aluminum layer on the tungsten layer, forming a hard mask on the aluminum layer, forming a patterned resist mask which covers the hard mask above the first region and exposes the hard mask layer above the second region, dry etching the hard mask and the aluminum layer above the second region using the patterned resist mask layer, removing the resist mask, and dry etching the tungsten layer using the hard mask layer to expose the first dielectric layer above the second region.

Abstract: A transport-of-intensity imaging system is proposed which incorporates a control element positioned in an optical relay system, such as a 4f optical relay system, between a microscope system for generating an image of a specimen, and an image capturing device. The control element is located with an optical relay system, and is controllable to vary the focal plane without changing the spacing of the specimen and the image capturing device. In one form the control element is an electronically tunable lens (ETL). In another form, the control element is a spatial light modulator (SLM). The arrangement may include a beam splitter arrangement for generating a plurality of beams, which are not all subject to the same control element, such that multiple images with different focal planes are captured from the respective beams.

Abstract: A transport-of-intensity imaging system is proposed which incorporates a control element positioned in an optical relay system, such as a 4f optical relay system, between a microscope system for generating an image of a specimen, and an image capturing device. The control element is located with an optical relay system, and is controllable to vary the focal plane without changing the spacing of the specimen and the image capturing device. In one form the control element is an electronically tunable lens (ETL). In another form, the control element is a spatial light modulator (SLM). The arrangement may include a beam splitter arrangement for generating a plurality of beams, which are not all subject to the same control element, such that multiple images with different focal planes are captured from the respective beams.