Patents by Inventor Chaofan XUE

Chaofan XUE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210397081
    Abstract: A method for manufacturing grating reference materials having a self-traceability includes: acquiring a mask substrate including a window region and a non-window region; fabricating, a self-traceability mask on the mask substrate by using a laser-focused atomic deposition technique; acquiring a photoresist sample including an extreme ultraviolet photoresist and a second substrate; exposing the extreme ultraviolet photoresist by combining the self-traceability mask with the soft x-ray interference lithography, and then performing a development process after exposing to obtain a photoresist grating structure; and transferring the photoresist grating structure to the second substrate to obtain the grating reference materials.
    Type: Application
    Filed: May 26, 2021
    Publication date: December 23, 2021
    Inventors: Xinbin CHENG, Xiao DENG, Jun ZHAO, Shumin YANG, Chaofan XUE, Yanqing WU, Renzhong TAI, Jie LIU, Zhenjie GU, Tongbao LI