Abstract: Provided are a three-dimensional vertical single transistor ferroelectric memory and a manufacturing method thereof. The ferroelectric memory comprises: a substrate; an insulating dielectric layer provided at the substrate; a channel structure extending through the insulating dielectric layer and connected to the substrate, the channel structure having a source/drain region and a channel region connected to the source/drain region; and a gate stack structure arranged around the channel structure and provided in the insulating dielectric layer opposite to the channel region, the gate stack structure comprising a ferroelectric insulation layer and a gate sequentially stacked in a direction away from the channel structure. The ferroelectric memory having the above structure can replace conventional DRAMs. Therefore, the invention realizes a high intensity high speed memory.

Abstract: Provided are a three-dimensional vertical single transistor ferroelectric memory and a manufacturing method thereof. The ferroelectric memory comprises: a substrate; an insulating dielectric layer provided at the substrate; a channel structure extending through the insulating dielectric layer and connected to the substrate, the channel structure having a source/drain region and a channel region connected to the source/drain region; and a gate stack structure arranged around the channel structure and provided in the insulating dielectric layer opposite to the channel region, the gate stack structure comprising a ferroelectric insulation layer and a gate sequentially stacked in a direction away from the channel structure. The ferroelectric memory having the above structure can replace conventional DRAMs. Therefore, the invention realizes a high intensity high speed memory.

Abstract: The disclosure provides a semiconductor device, a manufacturing method thereof, and an electronic device including the device. The semiconductor device includes: a substrate, the substrate being a silicon substrate or an SOI substrate; a SiGe Fin formed on the substrate, wherein the SiGe Fin is a sandwich-like SixGe1-x/SiyGe1-y/SizGe1-z structure with different Ge contents in the horizontal direction, where x is 0.05˜0.95, y is 0.1˜0.9, and z is 0.05˜0.95; and a shallow trench isolation region disposed on the substrate and adjacent to all sides of the SiGe Fin, wherein a top surface of the SiGe Fin facing away from the substrate protrudes from the shallow trench isolation region. The disclosure proposes a device structure of a sandwich-like SixGe1-x/SiyGe1-y/SizGe1-z Fin structure with different Ge contents, which can adjust the Ge content to change the band gap, thereby adjusting the threshold, and improving electrical properties such as mobility (effective mass change) and leakage.