Patents by Inventor Chaolin LO

Chaolin LO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Conduit check apparatus
    Patent number: 12642044
    Abstract: A system includes an electrostatic chuck defining a first conduit configured to emit a first gas. The system includes a conduit check apparatus for identifying a first conduit status of the first conduit. The conduit check apparatus includes a thermochromic structure including a first region positioned relative to a flow path of the first gas emitted from the first conduit. The first region of the thermochromic structure produces a first visual indication of the first conduit status.
    Type: Grant
    Filed: May 13, 2024
    Date of Patent: May 26, 2026
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Shih Yang Chiu, Cheng-Lung Wu, Chai Hsien Chen, Chaolin Lo, Yang-Ann Chu
  • CONDUIT CHECK APPARATUS
    Publication number: 20250349577
    Abstract: A system includes an electrostatic chuck defining a first conduit configured to emit a first gas. The system includes a conduit check apparatus for identifying a first conduit status of the first conduit. The conduit check apparatus includes a thermochromic structure including a first region positioned relative to a flow path of the first gas emitted from the first conduit. The first region of the thermochromic structure produces a first visual indication of the first conduit status.
    Type: Application
    Filed: May 13, 2024
    Publication date: November 13, 2025
    Inventors: Shih Yang CHIU, Cheng-Lung WU, Chai Hsien CHEN, Chaolin LO, Yang-Ann CHU