Abstract: A light emitting device, an optical detection system, an optical detection device and an optical detection method, the light emitting device comprising: a light source (01), and an aperture limiting unit (03) located on an emergent light path of the light source (01); the light source (01) is used to emit light; and the aperture limiting unit (03) is used to limit the aperture of light emitted by the light source (01) when a current detection area of an object to be tested (05) has a high aspect ratio structure so as to block a portion of light having a large included angle with the normal direction of the object to be tested (05).

Abstract: Disclosed are a testing apparatus and a testing method. When the testing apparatus is used to test a sample (11) to be tested, a first detection apparatus (21) and a second detection apparatus (22) can be switched by means of an objective lens switching apparatus (20), so as to acquire height information and structure information of the sample (11) to be tested. In the process, the sample (11) to be tested does not need to be transferred between testing apparatuses, thus, not only is pollution potentially created in the process of transferring the sample (11) to be tested avoided, and the probability of the sample (11) to be tested being polluted in the testing process reduced, but also a region to be tested of the sample (11) to be tested does not need to be determined repeatedly, improving the testing speed for the sample (11) to be tested.

Abstract: Disclosed are a testing apparatus and a testing method. When the testing apparatus is used to test a sample (11) to be tested, a first detection apparatus (21) and a second detection apparatus (22) can be switched by means of an objective lens switching apparatus (20), so as to acquire height information and structure information of the sample (11) to be tested. In the process, the sample (11) to be tested does not need to be transferred between testing apparatuses, thus, not only is pollution potentially created in the process of transferring the sample (11) to be tested avoided, and the probability of the sample (11) to be tested being polluted in the testing process reduced, but also a region to be tested of the sample (11) to be tested does not need to be determined repeatedly, improving the testing speed for the sample (11) to be tested.

Abstract: A light emitting device, an optical detection system, an optical detection device and an optical detection method, the light emitting device comprising: a light source (01), and an aperture limiting unit (03) located on an emergent light path of the light source (01); the light source (01) is used to emit light; and the aperture limiting unit (03) is used to limit the aperture of light emitted by the light source (01) when a current detection area of an object to be tested (05) has a high aspect ratio structure so as to block a portion of light having a large included angle with the normal direction of the object to be tested (05), such that the light is incident on the current detection area of the object to be tested (05) along the normal direction of the object to be tested (05) or along a direction that forms a small angle with the normal direction of the object to be tested (05). Thus, the high aspect ratio structure of the current detection area may be effectively detected.

Abstract: A method for measuring a temperature of a film in a reaction chamber is provided. The method includes: obtaining reflectivity sampling data R of a sampling point set in a detection area of the film for light with a wavelength ?, and thermal radiation value sampling data E of the sampling point set; obtaining a first correction factor ? and a second correction factor ? according to values of at least two sampling data groups, wherein 0<??1, 0???1; obtaining a blackbody radiation value Lb of the detection area of the film for the light with the wavelength ? according to the first correction factor ?, the second correction factor ? and the values of the at least two sampling data groups; obtaining a temperature T of the detection area by looking up a table according to the blackbody radiation value Lb and the wavelength ?.

Abstract: A method for measuring a temperature of a film in a reaction chamber is provided. The method includes: obtaining reflectivity sampling data R of a sampling point set in a detection area of the film for light with a wavelength ?, and thermal radiation value sampling data E of the sampling point set; obtaining a first correction factor ? and a second correction factor ? according to values of at least two sampling data groups, wherein 0<??1, 0???1; obtaining a blackbody radiation value Lb of the detection area of the film for the light with the wavelength ? according to the first correction factor ?, the second correction factor ? and the values of the at least two sampling data groups; obtaining a temperature T of the detection area by looking up a table according to the blackbody radiation value Lb and the wavelength ?.