Patents by Inventor Charlene Reaux

Charlene Reaux has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing a semiconductor device and apparatus to be used therefore
    Patent number: 6686297
    Abstract: A method of manufacturing an electronic device, in particular but not exclusively a semiconductor device, in which method a substrate (2) is placed inside a process chamber (1) and a surface (3) of the substrate (2) is subjected to an ozone treatment comprising the steps of: providing a liquid onto the surface (3) of the substrate (2) via first supply means, introducing a solution comprising a liquid carrier solvent and ozone gas into the process chamber (1) via second supply means, without bringing about direct contact between the solution and the surface (3) of the substrate (2).
    Type: Grant
    Filed: August 17, 2000
    Date of Patent: February 3, 2004
    Inventors: Georg Gogg, Dirk Maarten Knotter, Charlene Reaux, Steve Nelson