Patents by Inventor Charles A. Smith

Charles A. Smith has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10777407
    Abstract: Methods and apparatuses for selectively depositing silicon nitride on exposed surfaces of a substrate having hydroxyl end groups relative to exposed surfaces having S—H bonds are provided herein. Techniques involve providing a transition metal-containing reactant or a non-hydride aluminum-containing gas to the substrate to form a transition metal-containing or an aluminum-containing moiety on an exposed surface having hydroxyl end groups and selectively depositing silicon nitride on the surface using alternating pulses of an aminosilane and a hydrazine by thermal atomic layer deposition catalyzed by the transition metal-containing or aluminum-containing moiety on the exposed surface having hydroxyl end groups relative to an exposed surface having S—H bonds.
    Type: Grant
    Filed: January 14, 2019
    Date of Patent: September 15, 2020
    Assignee: Lam Research Corporation
    Inventors: David Charles Smith, Dennis M. Hausmann
  • Patent number: 10771410
    Abstract: Systems and techniques for supporting a veterinary practice are provided. Further, systems and techniques for the collection and display of animal wellness information are provided. Animal wellness data relating to a single animal patient or group of animal patients are collected and subsequently displayed at a desired remote location or on a mobile device so that a veterinarian can review the information.
    Type: Grant
    Filed: April 6, 2015
    Date of Patent: September 8, 2020
    Assignee: Zoetis Services LLC
    Inventors: Scott Devon Lyle, Daniel Charles Smith
  • Patent number: 10763108
    Abstract: Provided are methods for the selective deposition of material on a sidewall surface of a patterned feature. In some embodiments, the methods involve providing a substrate having a feature recessed from a surface of the substrate. The feature has a bottom and a sidewall which extends from the bottom. A conformal film is deposited on the feature using an atomic layer deposition (ALD) process. The conformal film deposited on the bottom is modified by exposing the substrate to directional plasma such that the conformal film on the bottom is less dense than the conformal film on the sidewall. The modified conformal film deposited on the bottom of the feature is preferentially etched. Also provided are methods for the selective deposition on a horizontal surface of a patterned feature.
    Type: Grant
    Filed: August 18, 2017
    Date of Patent: September 1, 2020
    Assignee: Lam Research Corporation
    Inventors: Dennis M. Hausmann, Alexander R. Fox, David Charles Smith, Bart J. van Schravendijk
  • Patent number: 10738851
    Abstract: The present invention relates to a disc brake caliper body comprising a mounting side bracket and a non-mounting side bracket extending along a circumferential direction of the body, each bracket being configured to hold at least one brake pad. In order to provide improved cooling efficiency while maintaining the required stability of the brake caliper, the caliper body further comprises at least one cooling duct formed by additive manufacturing, at least one cooling duct being an integral part of the caliper body.
    Type: Grant
    Filed: October 24, 2017
    Date of Patent: August 11, 2020
    Assignee: ALCON COMPONENTS LIMITED
    Inventors: Andrew Charles Smith, Stephen James Hodgkins, Richard James Humble
  • Publication number: 20200227260
    Abstract: Methods and apparatuses for selectively growing metal-containing hard masks are provided herein. Methods include providing a substrate having a pattern of spaced apart features, each feature having a top horizontal surface, filling spaces between the spaced apart features with carbon-containing material to form a planar surface having the top horizontal surfaces of the features and carbon-containing material, selectively depositing a metal-containing hard mask on the top horizontal surfaces of the features relative to the carbon-containing material, and selectively removing the carbon-containing material relative to the metal-containing hard mask and features.
    Type: Application
    Filed: March 30, 2020
    Publication date: July 16, 2020
    Inventors: David Charles Smith, Jon Henri, Dennis M. Hausmann, Paul C. Lemaire
  • Publication number: 20200219725
    Abstract: Thin tin oxide films are used as spacers in semiconductor device manufacturing. In one implementation, thin tin oxide film is conformally deposited onto a semiconductor substrate having an exposed layer of a first material (e.g., silicon oxide or silicon nitride) and a plurality of protruding features comprising a second material (e.g., silicon or carbon). For example, 10-100 nm thick tin oxide layer can be deposited using atomic layer deposition. Next, tin oxide film is removed from horizontal surfaces, without being completely removed from the sidewalls of the protruding features. Next, the material of protruding features is etched away, leaving tin oxide spacers on the substrate. This is followed by etching the unprotected portions of the first material, without removal of the spacers. Next, underlying layer is etched, and spacers are removed. Tin-containing particles can be removed from processing chambers by converting them to volatile tin hydride.
    Type: Application
    Filed: March 20, 2020
    Publication date: July 9, 2020
    Applicant: Lam Research Corporation
    Inventors: David Charles Smith, Richard Wise, Arpan Mahorowala, Patrick van Cleemput, Bart J. van Schravendijk
  • Publication number: 20200219718
    Abstract: Methods and apparatuses for selectively depositing oxide on an oxide surface relative to a nitride surface are described herein. Methods involve pre-treating a substrate surface using ammonia and/or nitrogen plasma and selectively depositing oxide on an oxide surface using alternating pulses of an aminosilane silicon precursor and an oxidizing agent in a thermal atomic layer deposition reaction without depositing oxide on an exposed nitride surface.
    Type: Application
    Filed: March 16, 2020
    Publication date: July 9, 2020
    Inventors: David Charles Smith, Dennis M. Hausmann
  • Patent number: 10662526
    Abstract: A method is provided, including the following operations: simultaneously applying an organosilyl chloride inhibitor and a Lewis base to a surface of a substrate, the organosilyl chloride inhibitor being configured to adsorb onto dielectric regions of the surface of the substrate; performing a plurality of cycles of an ALD process to deposit a metal oxide onto the surface of the substrate; wherein the applying of the organosilyl chloride inhibitor and the Lewis base prevents the ALD process from depositing the metal oxide onto the dielectric regions of the surface of the substrate.
    Type: Grant
    Filed: October 2, 2018
    Date of Patent: May 26, 2020
    Assignee: Lam Research Corporation
    Inventors: Dennis Hausmann, Alexander R. Fox, Paul C. Lemaire, David Charles Smith
  • Publication number: 20200156346
    Abstract: A machine for forming a container from a blank of sheet material is provided. The blank includes a reinforcing panel assembly for forming a reinforcing corner assembly. The machine includes a hopper station for storing the blank in a substantially flat configuration and a forming station for forming the blank into the container. The forming station includes an initial forming station that rotates a first portion of the reinforcing panel assembly with respect to a second portion of the reinforcing panel assembly, and a secondary forming station having male and female forming members with shapes corresponding to an interior shape and an exterior shape of the reinforcing corner assembly, respectively. The male and the female forming members are configured to form the reinforcing corner assembly by compressing together the first and second portions of the reinforcing panel assembly.
    Type: Application
    Filed: January 27, 2020
    Publication date: May 21, 2020
    Inventors: Amer Aganovic, Thomas Dean Graham, Kenneth Charles Smith, John Hershcel Conley, Robert Bradley Teany, Gregory Scott Gulik, Paul Andrew Spurlock
  • Patent number: 10643846
    Abstract: Methods and apparatuses for selectively growing metal-containing hard masks are provided herein. Methods include providing a substrate having a pattern of spaced apart features, each feature having a top horizontal surface, filling spaces between the spaced apart features with carbon-containing material to form a planar surface having the top horizontal surfaces of the features and carbon-containing material, selectively depositing a metal-containing hard mask on the top horizontal surfaces of the features relative to the carbon-containing material, and selectively removing the carbon-containing material relative to the metal-containing hard mask and features.
    Type: Grant
    Filed: June 28, 2018
    Date of Patent: May 5, 2020
    Assignee: Lam Research Corporation
    Inventors: David Charles Smith, Jon Henri, Dennis M. Hausmann, Paul C. Lemaire
  • Patent number: 10643889
    Abstract: A method of improving selectivity of a metal in a selective deposition process. A pre-treatment process for the metal modifies the metal surface, and includes first reducing the metal to remove organic contamination from the metal followed by oxidation of the metal to allow a monolayer of a metal oxide to grow on the surface. This modification of the metal allows inhibitor molecules to adsorb on the metal oxide monolayer to improve selectivity.
    Type: Grant
    Filed: August 6, 2018
    Date of Patent: May 5, 2020
    Assignee: Lam Rasearch Corporation
    Inventors: Dennis Hausmann, Elham Mohimi, Pengyi Zhang, Paul C. Lemaire, Kashish Sharma, Alexander R. Fox, Nagraj Shankar, Kapu Sirish Reddy, David Charles Smith
  • Patent number: 10629429
    Abstract: Methods and apparatuses for selectively depositing silicon oxide on a silicon oxide surface relative to a silicon nitride surface are described herein. Methods involve pre-treating a substrate surface using ammonia and/or nitrogen plasma and selectively depositing silicon oxide on a silicon oxide surface using alternating pulses of an aminosilane silicon precursor and an oxidizing agent in a thermal atomic layer deposition reaction without depositing silicon oxide on an exposed silicon nitride surface.
    Type: Grant
    Filed: November 30, 2018
    Date of Patent: April 21, 2020
    Assignee: Lam Research Corporation
    Inventors: David Charles Smith, Dennis M. Hausmann
  • Publication number: 20200118215
    Abstract: Introduced here are risk management platforms able to provide a variety of insurance services related to the sharing economy. The risk management platforms can collect/leverage data from an array of different sources, dynamically calculate an appropriate personalized price (e.g., for an insurance policy) based on risk, mitigate potential fraud, offer end-to-end digital servicing, etc.
    Type: Application
    Filed: October 12, 2018
    Publication date: April 16, 2020
    Inventors: Praveen RAO, Michael Seungwook SHIM, Paul Charles SMITH
  • Publication number: 20200118809
    Abstract: Methods are provided for conducting a deposition on a semiconductor substrate by selectively depositing a material on the substrate. The substrate has a plurality of substrate materials, each with a different nucleation delay corresponding to the material deposited thereon. Specifically, the nucleation delay associated with a first substrate material on which deposition is intended is less than the nucleation delay associated with a second substrate material on which deposition is not intended according to a nucleation delay differential, which degrades as deposition proceeds. A portion of the deposited material is etched to reestablish the nucleation delay differential between the first and the second substrate materials. The material is further selectively deposited on the substrate.
    Type: Application
    Filed: December 13, 2019
    Publication date: April 16, 2020
    Inventors: Kapu Sirish Reddy, Meliha Gozde Rainville, Nagraj Shankar, Dennis M. Hausmann, David Charles Smith, Karthik Sivaramakrishnan, David W. Porter
  • Publication number: 20200102650
    Abstract: A method is provided, including the following operations: simultaneously applying an organosilyl chloride inhibitor and a Lewis base to a surface of a substrate, the organosilyl chloride inhibitor being configured to adsorb onto dielectric regions of the surface of the substrate; performing a plurality of cycles of an ALD process to deposit a metal oxide onto the surface of the substrate; wherein the applying of the organosilyl chloride inhibitor and the Lewis base prevents the ALD process from depositing the metal oxide onto the dielectric regions of the surface of the substrate.
    Type: Application
    Filed: October 2, 2018
    Publication date: April 2, 2020
    Inventors: Dennis Hausmann, Alexander R. Fox, Paul C. Lemaire, David Charles Smith
  • Patent number: 10584909
    Abstract: A thermoelectric cooling apparatus for use with a motorcycle includes a housing having a bottom wall and a wall structure extending upwardly that defines an interior area and an open top providing selective access to the interior area. A conductive lining is situated adjacent to the insulation layer that includes an aluminum cooling plate upwardly displaced from the bottom wall such that the bottom wall, the wall structure and the cooling plate defining a hollow compartment. The cooling apparatus is mounted to a motorcycle with mounting straps and locked with a locking assembly. A thermoelectric assembly is situated in the compartment having a “cool” side coupled to a lower surface of the cooling plate of the lining and an opposed “hot” side, the thermoelectric assembly configured to electrically connect to the battery of the motorcycle such that the thermoelectric assembly conductively cools the cooling plate and the lining when actuated.
    Type: Grant
    Filed: February 14, 2018
    Date of Patent: March 10, 2020
    Inventors: Charlotte A. Bing, Charles Smith
  • Publication number: 20200054634
    Abstract: The present invention discloses an adjuvant treatment of node-positive, early stage, hormone receptor-positive (HR+), human epidermal growth factor receptor 2-negative (HER2?) breast cancer comprising administering an effective amount of an endocrine therapy in combination with an effective amount of abemaciclib or a pharmaceutically acceptable salt thereof.
    Type: Application
    Filed: April 25, 2018
    Publication date: February 20, 2020
    Inventor: Ian Charles SMITH
  • Patent number: 10562255
    Abstract: A machine for forming a container from a blank of sheet material is provided. The blank includes a reinforcing panel assembly for forming a reinforcing corner assembly. The machine includes a hopper station for storing the blank in a substantially flat configuration and a forming station for forming the blank into the container. The forming station includes an initial forming station that rotates a first portion of the reinforcing panel assembly with respect to a second portion of the reinforcing panel assembly, and a secondary forming station having male and female forming members with shapes corresponding to an interior shape and an exterior shape of the reinforcing corner assembly, respectively. The male and the female forming members are configured to form the reinforcing corner assembly by compressing together the first and second portions of the reinforcing panel assembly.
    Type: Grant
    Filed: August 14, 2017
    Date of Patent: February 18, 2020
    Assignee: WestRock Shared Services, LLC
    Inventors: Amer Aganovic, Thomas Dean Graham, Kenneth Charles Smith, John Hershcel Conley, Robert Bradley Teany, Gregory Scott Gulik, Paul Andrew Spurlock
  • Patent number: 10559461
    Abstract: Methods are provided for conducting a deposition on a semiconductor substrate by selectively depositing a material on the substrate. The substrate has a plurality of substrate materials, each with a different nucleation delay corresponding to the material deposited thereon. Specifically, the nucleation delay associated with a first substrate material on which deposition is intended is less than the nucleation delay associated with a second substrate material on which deposition is not intended according to a nucleation delay differential, which degrades as deposition proceeds. A portion of the deposited material is etched to reestablish the nucleation delay differential between the first and the second substrate materials. The material is further selectively deposited on the substrate.
    Type: Grant
    Filed: April 28, 2017
    Date of Patent: February 11, 2020
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Kapu Sirish Reddy, Meliha Gozde Rainville, Nagraj Shankar, Dennis M. Hausmann, David Charles Smith, Karthik Sivaramakrishnan, David W. Porter
  • Publication number: 20200043776
    Abstract: A method of improving selectivity of a metal in a selective deposition process. A pre-treatment process for the metal modifies the metal surface, and includes first reducing the metal to remove organic contamination from the metal followed by oxidation of the metal to allow a monolayer of a metal oxide to grow on the surface. This modification of the metal allows inhibitor molecules to adsorb on the metal oxide monolayer to improve selectivity.
    Type: Application
    Filed: August 6, 2018
    Publication date: February 6, 2020
    Inventors: Dennis HAUSMANN, Elham MOHIMI, Pengyi ZHANG, Paul C. LEMAIRE, Kashish SHARMA, Alexander R. FOX, Nagraj SHANKAR, Kapu Sirish REDDY, David Charles SMITH