Abstract: Micro-fabricated charge-emission devices comprise an electrically conductive gate electrode with an aperture, an electrically conductive base electrode, a charge-emitting microstructure extending from a surface in electrical contact with the base electrode and terminating near the aperture of the gate electrode, and a dielectric layer stack disposed between the base electrode and the gate electrode. The dielectric layer stack comprises a first dielectric layer and a second dielectric layer. The first dielectric layer is disposed between the second dielectric layer and the base electrode. The first dielectric layer is of a different selectively etchable dielectric material than the second dielectric layer. The dielectric layer stack h formed therein a cavity within which the charge-emitting emitting microstructure is disposed. The cavity has a corrugated wall shaped by the first dielectric layer undercutting the second dielectric layer.

Abstract: Described is a micro-fabricated charged particle emission device including a substrate and a plurality of charged particle emission sites formed in the substrate. A path extends between each emission site and a source of liquid metal. Each path is coated with a wetting layer of non-oxidizing metal for wetting the liquid metal. Exemplary non-oxidizing metals that may be used to make the wetting layer include gold and platinum. The wetting layer is sufficiently thin such that some liquid metal is able to flow to each emission site despite any chemical interaction between the liquid metal and the non-oxidizing metal of the wetting layer.

Abstract: Described is a micro-fabricated charged particle emission device including a substrate and a plurality of charged particle emission sites formed in the substrate. A path extends between each emission site and a source of liquid metal. Each path is coated with a wetting layer of non-oxidizing metal for wetting the liquid metal. Exemplary non-oxidizing metals that may be used to make the wetting layer include gold and platinum. The wetting layer is sufficiently thin such that some liquid metal is able to flow to each emission site despite any chemical interaction between the liquid metal and the non-oxidizing metal of the wetting layer.

Abstract: Described is a micro-fabricated charged particle emission device including a substrate and a plurality of charged particle emission sites formed in the substrate. A path extends between each emission site and a source of liquid metal. Each path is coated with a wetting layer of non-oxidizing metal for wetting the liquid metal. Exemplary non-oxidizing metals that may be used to provide the wetting layer include gold and platinum. The wetting layer is sufficiently thin such that some liquid metal is able to flow to each emission site despite any chemical interaction between the liquid metal and the non-oxidizing metal of the wetting layer.

Abstract: Described is a micro-fabricated charged particle emission device including a substrate and a plurality of charged particle emission sites formed in the substrate. A path extends between each emission site and a source of liquid metal. Each path is coated with a wetting layer of non-oxidizing metal for wetting the liquid metal. Exemplary non-oxidizing metals that may be used to provide the wetting layer include gold and platinum. The wetting layer is sufficiently thin such that some liquid metal is able to flow to each emission site despite any chemical interaction between the liquid metal and the non-oxidizing metal of the wetting layer.

Abstract: Described are a method and system for dispensing a fluid. A fluid-dispensing device includes a substrate and a plurality of nozzles formed in the substrate. Each nozzle has an open-ended tip and a fluid-conducting channel between the tip and a source of fluid. A non-conducting spacer is on the substrate and electrically isolates a gate electrode from the substrate. The gate electrode is located adjacent to the tip of at least one of the nozzles to effect dispensing of the fluid in that nozzle in response to a voltage applied between the gate electrode and the nozzle or fluid in the nozzle. In one embodiment, the gate electrode includes a plurality of individually addressable gate electrodes used for selectively actuating nozzles.

Abstract: Described are a method and system for dispensing a fluid. A fluid-dispensing device comprises a substrate and a plurality of nozzles formed in the substrate. Each nozzle has an open-ended tip and a fluid-conducting channel between the tip and a source of fluid. A non-conducting spacer is on the substrate and electrically isolates a gate electrode from the substrate. The gate electrode is located adjacent to the tip of at least one of the nozzles to effect dispensing of the fluid in that nozzle in response to a voltage applied between the gate electrode and the nozzle or fluid in the nozzle. In one embodiment, the gate electrode includes a plurality of individually addressable gate electrodes used for selectively actuating nozzles.

Abstract: An arrangement for and method of automatically collimating an expanding electron beam emitted from a field emission cathode is disclosed herein. This is accomplished without an externally powered colimating or focusing electrode. Rather, a dielectric member is positioned around the path taken by the beam so that when the beam is initially turned on, it bombards the dielectric member with free electrons and thereby places a negative electrostatic charge, ultimately reaching the potential of the cathode electrode itself, on the dielectric member. This electrostatic charge, in turn, causes the cross-sectional configuration of the beam to contract.

Abstract: An electric field producing structure especially suitable as electron or field forming sources in vacuum devices is disclosed herein along with its method of manufacture. The structure so disclosed includes upper and lower, generally planar electrodes spaced apart in parallel confronting relationship to one another with a dielectric layer therebetween so as to electrically insulate the electrodes from one another. A series of apertures are formed with the upper electrode and the dielectric layer. Each aperture is deeper than it is wide and contains a single electrically conductive protuberance extending up from the lower electrode. Each protuberance is formed in at least two stages by successive physical evaporative deposition processes so that the uppermost tip of each protuberance in its associated aperture is substantially coplanar with the upper electrode.

Abstract: A matrix-addressed flat panel display is described, utilizing cathodes of the field emission type. The cathodes are incorporated into the display backing structure, and energize corresponding cathodoluminescent areas on a face plate. The face plate is spaced 40 microns from the cathode arrangement in the preferred embodiment, and a vacuum is provided in the space between the plate and such cathodes. Spacers in the form of legs interspersed among the pixels maintain the spacing, and electrical connections for the bases of the cathodes are diffused sections through the backing structure.

Abstract: A microelectronic field ionizer and alternate fabrication procedures for the same are described. The field ionizer has an array of small diameter gas outlets in the form of microvolcanos. A counterelectrode layer of material is provided on the microelectronic substrate, in the registration with the gas outlets.

Abstract: Several embodiments of a thin film field emission cathode array are described which automatically shape the beams of emitted particles, without the addition of shaping or other electrode structure. A potential field pattern is established to control the trajectory of the emitted particles, by controlling the electromagnetic interaction of the conductive structures responsible for the particle emission.

Abstract: A matrix-addressed flat panel display is described, utilizing cathodes of the field emission type. The cathodes are incorporated into the display backing structure, and energize corresponding cathodoluminescent areas on a face plate. The face plate is spaced 40 microns from the cathode arrangement in the preferred embodiment, and a vacuum is provided in the space between the plate and such cathodes. Spacers in the form of legs interspersed among the pixels maintain the spacing, and electrical connections for the bases of the cathodes are diffused sections through the backing structure.

Abstract: A method of fabricating a funnel-shaped miniature electrode with thin walls and very sharp edges for use in a field ionization source for ionizing components of a fluid sample is disclosed, which method includes the use of a female mold, or matrix, formed with a stepped, generally frustoconical-shaped aperture therethrough. The aperture wall includes a plurality of different diameter generally tapered wall sections of decreasing size in going along the aperture axis, with the smallest diameter section at the one end being of short length and small diameter. It is convenient, but not necessary, to coat the aperture wall with a parting layer which aids in the separation of the subsequently-formed miniature funnel-shaped electrode from the female mold and facilitates cleaning of the mold for reuse.