Abstract: In the air track system disclosed herein, reticles used in a microlithographic imaging system are transported on an air track and are guided from one side by means of vertically directed air jets which maintain an essentially controlled gap between the edge of the reticle and a side rail extending along the track.

Abstract: In a plasma device having a toroidal plasma containment vessel, a toroidal field-generating coil system includes fixed linking coils each formed of first and second sections with the first section passing through a central opening through the containment vessel and the second section completing the linking coil to link the containment vessel. A plurality of removable unlinked coils are each formed of first and second C-shaped sections joined to each other at their open ends with their bights spaced apart. The second C-shaped section of each movable coil is removably mounted adjacent the second section of a linking coil, with the containment vessel disposed between the open ends of the first and second C-shaped sections. Electric current is passed through the linking and removable coils in opposite sense in the respective adjacent second sections to produce a net toroidal field.