Patents by Inventor Charles Chuin-Chieh Yang

Charles Chuin-Chieh Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for calibrating nanotopographic measuring equipment
    Publication number: 20020185053
    Abstract: The present invention is directed to a method of calibrating a laser scanning nanotopography measuring device with a metrology standard having grown-in nanotopographic artifacts on the surface of an epitaxial layer on a silicon wafer substrate.
    Type: Application
    Filed: May 24, 2001
    Publication date: December 12, 2002
    Inventors: Lu Fei, Charles Chuin-Chieh Yang