Abstract: A sensor device including a substrate that is transparent and/or flexible, and a transparent sensor array disposed on the substrate. The transparent sensor array includes transparent sensor circuits and transparent interconnects electrically coupled to the transparent sensor circuits. Each of the transparent sensor circuits includes a transparent transistor. A transparent slide may include a transparent sensor circuit disposed on a transparent substrate. The slide may be prepared for observation of a specimen by placing the specimen in fluidic communication with the transparent sensor circuit. A flexible sensor device may include an array of transparent sensor circuits disposed on a flexible substrate. The flexible sensor device may be placed on the surface of an object to determine parameters at locations adjacent to the surface of the object. A method of fabricating an integrated circuit may include using a multilayer etch mask of electron-beam resist and photoresist.

Abstract: A sensor device including a substrate that is transparent and/or flexible, and a transparent sensor array disposed on the substrate. The transparent sensor array includes transparent sensor circuits and transparent interconnects electrically coupled to the transparent sensor circuits. Each of the transparent sensor circuits includes a transparent transistor. A transparent slide may include a transparent sensor circuit disposed on a transparent substrate. The slide may be prepared for observation of a specimen by placing the specimen in fluidic communication with the transparent sensor circuit. A flexible sensor device may include an array of transparent sensor circuits disposed on a flexible substrate. The flexible sensor device may be placed on the surface of an object to determine parameters at locations adjacent to the surface of the object. A method of fabricating an integrated circuit may include using a multilayer etch mask of electron-beam resist and photoresist.