Patents by Inventor Charles E. Pomeroy

Charles E. Pomeroy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Minimum contact area wafer clamping with gas flow for rapid wafer cooling
    Patent number: 8454294
    Abstract: Apparatuses and methods for cooling and transferring wafers from low pressure environment to high pressure environment are provided. An apparatus may include a cooling pedestal and a set of supports for holding the wafer above the cooling pedestal. The average gap between the wafer and the cooling pedestal may be no greater than about 0.010 inches. Venting gases may be used to increase the pressure inside the apparatus during the transfer. In certain embodiment, venting gases comprise nitrogen.
    Type: Grant
    Filed: September 7, 2011
    Date of Patent: June 4, 2013
    Assignee: Novellus Systems, Inc.
    Inventors: Christopher Gage, Charles E. Pomeroy, David Cohen, Nagarajan Kalyanasundaram
  • MINIMUM CONTACT AREA WAFER CLAMPING WITH GAS FLOW FOR RAPID WAFER COOLING
    Publication number: 20110318142
    Abstract: Apparatuses and methods for cooling and transferring wafers from low pressure environment to high pressure environment are provided. An apparatus may include a cooling pedestal and a set of supports for holding the wafer above the cooling pedestal. The average gap between the wafer and the cooling pedestal may be no greater than about 0.010 inches. Venting gases may be used to increase the pressure inside the apparatus during the transfer. In certain embodiment, venting gases comprise nitrogen.
    Type: Application
    Filed: September 7, 2011
    Publication date: December 29, 2011
    Inventors: Christopher Gage, Charles E. Pomeroy, David Cohen, Nagarajan Kalyanasundaram
  • Minimum contact area wafer clamping with gas flow for rapid wafer cooling
    Patent number: 8033771
    Abstract: Apparatuses and methods for cooling and transferring wafers from low pressure environment to high pressure environment are provided. An apparatus may include a cooling pedestal and a set of supports for holding the wafer above the cooling pedestal. The average gap between the wafer and the cooling pedestal may be no greater than about 0.010 inches. Venting gases may be used to increase the pressure inside the apparatus during the transfer. In certain embodiment, venting gases comprise nitrogen.
    Type: Grant
    Filed: December 11, 2008
    Date of Patent: October 11, 2011
    Assignee: Novellus Systems, Inc.
    Inventors: Christopher Gage, Charles E. Pomeroy, David Cohen, Nagarajan Kalyanasundaram
  • Device for removing dissolved gas from a liquid
    Patent number: 5772736
    Abstract: An apparatus and a method for delivering a liquid are disclosed. The liquid contained in a vessel is subjected to a pressurized gas. Any pressurized gas dissolved in the liquid is removed in a degas module by passing the liquid through a gas permeable tube subjected to a pressure differential. Then the liquid is dispensed by a liquid mass flow controller.
    Type: Grant
    Filed: February 28, 1997
    Date of Patent: June 30, 1998
    Assignee: Novellus Systems, Inc.
    Inventors: Bart J. van Schravendijk, Christopher W. Burkhart, Tito H. Santiago, Charles E. Pomeroy, Jeffrey W. Lind
  • Device for removing dissolved gas from a liquid
    Patent number: 5645625
    Abstract: An apparatus and a method for delivering a liquid are disclosed. The liquid contained in a vessel is subjected to a pressurized gas. Any pressurized gas dissolved in the liquid is removed in a degas module by passing the liquid through a gas permeable tube subjected to a pressure differential. Then the liquid is dispensed by a liquid mass flow controller.
    Type: Grant
    Filed: February 23, 1995
    Date of Patent: July 8, 1997
    Assignee: Novellus Systems, Inc.
    Inventors: Bart J. van Schravendijk, Christopher W. Burkhart, Tito H. Santiago, Charles E. Pomeroy, Jeffrey W. Lind
  • Device for removing dissolved gas from a liquid
    Patent number: 5425803
    Abstract: An apparatus and a method for delivering a liquid are disclosed. The liquid contained in a vessel is subjected to a pressurized gas. Any pressurized gas dissolved in the liquid is removed in a degas module by passing the liquid through a gas permeable tube subjected to a pressure differential. Then the liquid is dispensed by a liquid mass flow controller.
    Type: Grant
    Filed: July 5, 1994
    Date of Patent: June 20, 1995
    Assignee: Novellus Systems, Inc.
    Inventors: Bart J. van Schravendijk, Christopher W. Burkhart, Tito H. Santiago, Charles E. Pomeroy, Jeffrey W. Lind