Patents by Inventor Charles F. King

Charles F. King has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7132327
    Abstract: A patterning method allows for separate transfer of a complementary reticle set. In one embodiment, for example, the method includes etching a phase shift mask (PSM), then etching a cut mask for a cPSM mask. Moreover, a decoupled complementary mask patterning transfer method includes two separate and decoupled mask patterning steps which form combined patterns through the use of partial image transfers into an intermediate hard mask prior to final wafer patterning. The intermediate and final hard mask materials are chosen to prevent image transfer into an underlying substrate or wafer prior to the final etch process.
    Type: Grant
    Filed: May 25, 2004
    Date of Patent: November 7, 2006
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Tab A. Stephens, Chong-Cheng Fu, Charles F. King
  • Patent number: 6709793
    Abstract: A method (100) to manufacture semiconductor reticles associated with a design uses an optical pattern correction (OPC) test pattern (104) in a first reticle frame and having subresolution features that will not resolve or appear on a resulting wafer. A first reticle is made (106) and critical parameters are extracted from the first reticle (108). The critical parameters are used to execute an OPC model (112) to generate a modified design. A production reticle is made from the modified design. The OPC test pattern is placed in a second reticle frame and a second reticle is manufactured. Critical parameters from the second reticle are compared with the critical parameters from the first reticle and must be within a predetermined tolerance or the reticle build process is modified until the tolerance is reached.
    Type: Grant
    Filed: October 31, 2002
    Date of Patent: March 23, 2004
    Assignee: Motorola, Inc.
    Inventors: Keith Brankner, Charles F. King, Lloyd C. Litt
  • Patent number: D390459
    Type: Grant
    Filed: November 29, 1996
    Date of Patent: February 10, 1998
    Inventor: Charles F. King