Patents by Inventor Charles G. Meador

Charles G. Meador has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Passivation of silicon oxide during photoresist burnoff
    Patent number: 4544416
    Abstract: A method of removal of photoresist in a manufacturing process for semiconductor devices utilizes burnoff in an oxidizing atmosphere. In order to reduce contamination of underlying silicon dioxide layers, chlorine in the atmosphere getters Na+ ions, etc. The chlorine gas is obtained from HCL added to the oxidizing atmosphere.
    Type: Grant
    Filed: August 26, 1983
    Date of Patent: October 1, 1985
    Assignee: Texas Instruments Incorporated
    Inventors: Charles G. Meador, Eddie H. Breashears