Abstract: An EUV microscope device utilizing a source of a beam of EUV light. The light is sent to a collector which produces a first focused EUV beam. A monochromator receives the first focused EUV beam and produces a second EUV beam that is passed to an illumination module. The output of the illumination module is passed to a mask. The reflected beam from the mask is sent to a zone plate and a detector to produce an image.

Abstract: An EUV microscope apparatus utilizing a source of EUV light. The light is sent to a collector which creates a first focused EUV beam. A monochromator module receives the first focused EUV beam and produces a second focused EUV beam that is passed to an illumination module. The output of the illumination module is reflected off a mask. The reflected beam from the mask is sent to a zone-plate and a detector to produce an image.

Abstract: Liquid supply apparatus is disclosed for controlling the supply of liquid to humidifier apparatus. The liquid supply apparatus has a chamber with an inlet through which a liquid such as water is supplied to the chamber. The chamber has a flow detector to detect liquid entering the chamber and a level detector near the base of the chamber in a narrow portion of the chamber which, in conjunction with a calibrated orifice at the chamber outlet, provides an indication of the rate of liquid flow from the chamber. Control of supply of liquid is performed by a magnetically activated valve member.

Abstract: A humidifier provides humidified gases to a patient. The humidifier is very compact, having a gases volume of the order of 60 mls. A microporous water compartment is provided perpendicular to the gases flow to ensure efficient humidification of the gases. Also, a combined temperature probe and heater supply connector is provided which only supplies energy to the heater in the water compartment when the gases temperature sensor is appropriately positioned in the humidifier gases passageway. This reduces the risk of gases at excessively high temperatures being supplies to the patient.

Abstract: A humidifier of small gases passageway volume (of the order of 50 ml gases space) has a heater within a water containing envelope having a microporous wall common to the water space within the envelope and the gases space, the microporous wall being permeable to water vapour but not liquid water and the envelope being reinforced by a support which also directs the flow of gases over the surface of the envelope. The heater is wound as a flat spiral to avoid the effect of gases or water vapour bubbles on heater performance temperature.