Patents by Inventor Charles H. R. Steele

Charles H. R. Steele has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for defining polycrystalline silicon patterns
    Patent number: 4026733
    Abstract: A process and method for accurately defining polycrystalline silicon patterns from a masking member. The critical dimensions of the silicon patterns are controlled by a diffusion step. Self-limiting etching is achieved through use of an etchant which discriminates between doped and undoped polycrystalline silicon. The process which provides significant advantages in production processing, permits fabrication of narrower gates and smoother edges on elongated silicon strips.
    Type: Grant
    Filed: October 29, 1975
    Date of Patent: May 31, 1977
    Assignee: Intel Corporation
    Inventors: William H. Owen, III, Charles H. R. Steele, Richard D. Pashley