Patents by Inventor Charles J. Marsman

Charles J. Marsman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • DELIVERY DEVICE
    Publication number: 20100300361
    Abstract: Delivery devices for delivering solid precursor compounds in the vapor phase to reactors are provided. Such devices include a precursor composition of a solid precursor compound with a layer of packing material disposed thereon. Also provided are methods for transporting a carrier gas saturated with the precursor compound for delivery into such CVD reactors.
    Type: Application
    Filed: May 25, 2010
    Publication date: December 2, 2010
    Applicant: Rohm and Haas Electronic Materials LLC
    Inventors: Deodatta Vinayak SHENAI-KHATKHATE, Michael L. Timmons, Charles J. Marsman, Egbert Woelk, Ronald L. DiCarlo, JR.
  • Delivery device
    Patent number: 7722720
    Abstract: Delivery devices for delivering solid precursor compounds in the vapor phase to reactors are provided. Such devices include a precursor composition of a solid precursor compound with a layer of packing material disposed thereon. Also provided are methods for transporting a carrier gas saturated with the precursor compound for delivery into such CVD reactors.
    Type: Grant
    Filed: December 6, 2005
    Date of Patent: May 25, 2010
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: Deodatta Vinayak Shenai-Khatkhate, Michael L. Timmons, Charles J. Marsman, Egbert Woelk, Ronald L. DiCarlo, Jr.