Patents by Inventor Charles J. Wood

Charles J. Wood has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reduction of sodium contamination in a semiconductor device
    Publication number: 20020121501
    Abstract: A plasma etcher for processing a semiconductor wafer and avoid sodium contamination is provided. The etcher includes a chamber having first and second adjoining regions. The etcher further includes a radio frequency source for generating plasma in the first region from delivered gas. A separator is positioned between the first and second regions for transmitting nonionized gas into the second region.
    Type: Application
    Filed: March 5, 2001
    Publication date: September 5, 2002
    Inventors: Scott F. Choquette, Brian David Crevasse, Charles J. Wood, David Allen Knorr, Stephen Ward Downey