Patents by Inventor Charles Lutti

Charles Lutti has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for planarizing organosilicate layers
    Publication number: 20020160692
    Abstract: A method for planarizing an organosilicate layer is provided. The organosilicate material layer is planarized using a slurry in conjunction with a chemical mechanical polishing (CMP) process. The slurry comprises an abrasive material dispersed in a suitable solvent. The slurry preferably has a pH greater than about 9. The abrasive material preferably has an average particle size greater than about 35 nm (nanometers).
    Type: Application
    Filed: April 27, 2001
    Publication date: October 31, 2002
    Applicant: Applied Materials, Inc.
    Inventors: Maurice Rivoire, Frederic Gaillard, Charles Lutti, Ellie Yieh