Patents by Inventor Charles M. FREE

Charles M. FREE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Medium current ribbon beam for ion implantation
    Patent number: 9269528
    Abstract: A method of setting up a medium current ribbon beam for ion implantation is provided. It includes providing an ion source fed with a process gas and a support gas. The process ion beam is separated from the support gas beam with a mass analyzing magnet, and the intensity of the process ion beam is controlled by varying the ratio of process gas to support gas in the ion source gas feed. Process beam intensity may also be controlled with one or more mechanical current limiting devices located downstream of the ion source. An ion beam system is also provided. This method may control the total ribbon beam intensity at the target between approximately 3 uA to about 3 mA.
    Type: Grant
    Filed: September 18, 2014
    Date of Patent: February 23, 2016
    Assignee: ADAVANCED ION BEAM TECHNOLOGY, INC.
    Inventors: Robert Kaim, Charles M. Free, David Hoglund, Wilhelm P. Platow, Kourosh Saadatmand
  • MEDIUM CURRENT RIBBON BEAM FOR ION IMPLANTATION
    Publication number: 20150102233
    Abstract: A method of setting up a medium current ribbon beam for ion implantation is provided. It includes providing an ion source fed with a process gas and a support gas. The process ion beam is separated from the support gas beam with a mass analyzing magnet, and the intensity of the process ion beam is controlled by varying the ratio of process gas to support gas in the ion source gas feed. Process beam intensity may also be controlled with one or more mechanical current limiting devices located downstream of the ion source. An ion beam system is also provided. This method may control the total ribbon beam intensity at the target between approximately 3 uA to about 3 mA.
    Type: Application
    Filed: September 18, 2014
    Publication date: April 16, 2015
    Inventors: Robert KAIM, Charles M. FREE, David HOGLUND, Wilhelm P. PLATOW, Kourosh SAADATMAND