Patents by Inventor Charles McFee

Charles McFee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Interferometric microscopy using reflective optics for complex surface shapes
    Patent number: 7212291
    Abstract: An apparatus including: (i) an interferometer positioned to derive measurement and reference wavefronts from a source of electromagnetic radiation, wherein the interferometer is configured to direct the measurement wavefront to reflect from a measurement surface and the reference wavefront to reflect from a reference surface, and further directs reflected measurement and reflected reference wavefronts to overlap with one another and to form an interference pattern; (ii) an auxiliary optic having a curved reflective surface positioned to redirect the measurement wavefront between the interferometer and the measurement surface; and (iii) a translation stage, wherein paths for the measurement and reference wavefronts define an optical measurement surface corresponding to a theoretical test surface that would reflect the measurement wavefront to produce a zero optical path length difference between the measurement and reference wavefronts, and wherein the translation stage is configured to scan the optical measur
    Type: Grant
    Filed: December 20, 2004
    Date of Patent: May 1, 2007
    Assignee: Zygo Corporation
    Inventors: Xavier Colonna De Lega, Charles McFee
  • Interferometric microscopy using reflective optics for complex surface shapes
    Publication number: 20050134863
    Abstract: An apparatus including: (i) an interferometer positioned to derive measurement and reference wavefronts from a source of electromagnetic radiation, wherein the interferometer is configured to direct the measurement wavefront to reflect from a measurement surface and the reference wavefront to reflect from a reference surface, and further directs reflected measurement and reflected reference wavefronts to overlap with one another and to form an interference pattern; (ii) an auxiliary optic having a curved reflective surface positioned to redirect the measurement wavefront between the interferometer and the measurement surface; and (iii) a translation stage, wherein paths for the measurement and reference wavefronts define an optical measurement surface corresponding to a theoretical test surface that would reflect the measurement wavefront to produce a zero optical path length difference between the measurement and reference wavefronts, and wherein the translation stage is configured to scan the optical measur
    Type: Application
    Filed: December 20, 2004
    Publication date: June 23, 2005
    Inventors: Xavier Colonna De Lega, Charles McFee