Abstract: A compact valve block for a chemical container wherein the coaxial valve block has a housing that can accommodate three valve control mechanisms thus allowing for quick and effective purging without the need for an additional external conduit, valves, and coaxial injector. The advantage is a greatly reduced amount of wetted surface area inside the valve block leading to a significant decrease in the time it takes to purge a system thus allowing for quicker times to change chemical containers.

Abstract: A chemical precursor container is disclosed. The container includes a vessel and a lid that define an interior volume, an inlet conduit, an outlet conduit, and a flow distributor positioned inside the vessel and in fluid flow communication with the inlet conduit. The flow distributor has an annular shape and includes a distributor floor having a plurality of apertures formed therein for expelling carrier gas therethrough. The flow distributor includes an inner annular wall that defines a porthole in the flow distributor that allows fluid to pass through the flow distributor from the interior volume of the vessel to the outlet conduit.

Abstract: An ultrasonic sensor probe (100) and controller (109). The controller (109) is operationally configured to determine and display wet and dry status of each of a plurality of ultrasonic sensors (156) positioned in the barrel (123) of the probe (100). The controller (109) may change the status of a sensor (156) from wet to dry or dry to wet if certain conditions are met, such as the sensor (156) consistently indicates the new status over multiple readings or over a predetermined period of time. The controller (109) preferably includes a two-wire output capable of producing a stepped analog or digital signal that indicates the fluid level in a container in which the probe (100) is positioned.

Abstract: A fully removable chime or valve guard that can support the container on its top, side and bottom is provided. The removable chime or valve guard provides protection if the container is dropped on its side or top. The protection provided allows the containers to pass a drop test per 49 CFR section 178.603, so the containers can be certified per 49 CFR 178.504.

Abstract: An ultrasonic sensor probe (100) and controller (109). The controller (109) is operationally configured to determine and display wet and dry status of each of a plurality of ultrasonic sensors (156) positioned in the barrel (123) of the probe (100). The controller (109) may change the status of a sensor (156) from wet to dry or dry to wet if certain conditions are met, such as the sensor (156) consistently indicates the new status over multiple readings or over a predetermined period of time. The controller (109) preferably includes a two-wire output capable of producing a stepped analog or digital signal that indicates the fluid level in a container in which the probe (100) is positioned.

Abstract: In one respect, the invention is an improved valve block design having minimal or no deadlegs that improves the efficiency of a system purge process. In another respect, the invention is a system incorporating said improved valve block design.

Abstract: Described herein are aerosol-free vessels, delivery containers, systems and methods using same for providing improvements to precursor utilization in the containers for deposition process, as well as the cleaning and refilling of the containers. The clogging of valves and piping as some precursors decompose vapor are minimized. This invention prevents mist from forming and thus preventing clogging or wafer contamination from aerosols.

Abstract: Described herein are systems and methods using same for the storage and delivery of chemical precursors that are used in the manufacture of a semiconductor device. In one aspect, the storage system comprises the chemical precursors and a container and the systems have an inlet jet design. The chemical precursor has a low vapor pressure less than about 50 Torr-absolute at container temperature set for delivery. The delivery system further contains a carrier gas. The inlet jet design can deliver the carrier gas at a certain pressure and a certain low rate to impinge upon the surface of the chemical precursors to produce a vapor or droplets of the chemical precursor. The vapor or droplets of the chemical precursor then combine with the carrier gas to provide a precursor-laden fluid stream which will be passed to and used in the processing tool.

Abstract: A chemical precursor container is disclosed. The container includes a vessel and a lid that define an interior volume, an inlet conduit, an outlet conduit, and a flow distributor positioned inside the vessel and in fluid flow communication with the inlet conduit. The flow distributor has an annular shape and includes a distributor floor having a plurality of apertures formed therein for expelling carrier gas therethrough. The flow distributor includes an inner annular wall that defines a porthole in the flow distributor that allows fluid to pass through the flow distributor from the interior volume of the vessel to the outlet conduit.

Abstract: Described herein are delivery containers, systems and methods using same for providing improvements to precursor utilization in the containers for deposition process, as well as the cleaning and refilling of the containers. The containers are designed with structures which allow a carrier gas to be delivered from a flow distributor. The flow distributor comprises a plurality of small openings (jets) through which the carrier gas enters the precursor chamber and impinges upon the surface of the chemical precursors to produce a vapor.

Abstract: A vessel for conveying a precursor-containing fluid stream from a precursor material contained within the vessel using a carrier gas. The vessel defines an interior volume segmented into an upper volume and a lower volume, the upper volume being in fluid communication with the lower volume, the lower volume containing substantially all of the precursor material and being separated from the upper volume by a separator. The vessel includes a diffuser tube that extends from an inlet port, through the separator and has a distal end having a plurality of openings formed therein and extends along the bottom interior wall of the vessel.

Abstract: A fully removable chime or valve guard that can support the container on its top, side and bottom is provided. The removable chime or valve guard provides protection if the container is dropped on its side or top. The protection provided allows the containers to pass a drop test per 49 CFR section 178.603, so the containers can be certified per 49 CFR 178.504.

Abstract: An ultrasonic probe having ultrasonic sensors (e.g., piezoelectric crystals) for measuring the level of liquid within a sealed container and having features that make the probe more reliable and enable more precise liquid level readings as the container nears an empty state. Embodiments include spacing the ultrasonic sensors more closely at the lower end of the probe, offsetting the sensors to enable tighter vertical spacing, matched pairs of sensors for redundancy, and a downward facing sensor located at the lower end of the probe to decrease the minimum liquid level that can be accurately measured by the probe. A sump may also be provided to further decrease the minimum liquid level that can be accurately measured by the probe.

Abstract: An ultrasonic sensor probe (100) and controller (109). The controller (109) is operationally configured to determine and display wet and dry status of each of a plurality of ultrasonic sensors (156) positioned in the barrel (123) of the probe (100). The controller (109) may change the status of a sensor (156) from wet to dry or dry to wet if certain conditions are met, such as the sensor (156) consistently indicates the new status over multiple readings or over a predetermined period of time. The controller (109) preferably includes a two-wire output capable of producing a stepped analog or digital signal that indicates the fluid level in a container in which the probe (100) is positioned.

Abstract: In one respect, the invention is an improved valve block design having minimal or no deadlegs that improves the efficiency of a system purge process. In another respect, the invention is a system incorporating said improved valve block design.

Abstract: Described herein are delivery containers, systems and methods using same for providing improvements to precursor utilization in the containers for deposition process, as well as the cleaning and refilling of the containers. The containers are designed with structures which allow a carrier gas to be delivered from a flow distributor. The flow distributor comprises a plurality of small openings (jets) through which the carrier gas enters the precursor chamber and impinges upon the surface of the chemical precursors to produce a vapor.

Abstract: A vessel for conveying a precursor-containing fluid stream from a precursor material contained within the vessel, the vessel comprising: an interior volume defined by a top, one or more sidewalls, and a base; and at least one fluid outlet for vaporized precursor, and at least one particle barrier that defines at least one particle restricted space within the interior volume, wherein said particle barrier comprises at least one 3-dimensional filter. A method for using the apparatus is also disclosed.

Abstract: A vessel for conveying a precursor-containing fluid stream from a precursor material contained within the vessel, the vessel comprising: an interior volume defined by a top, one or more sidewalls, and a base; and at least one fluid outlet for vaporized precursor, and at least one particle barrier that defines at least one particle restricted space within the interior volume, wherein said particle barrier comprises at least one 3-dimensional filter. A method for using the apparatus is also disclosed.

Abstract: In one respect, the invention is an improved diptube design for a container for containing and dispensing a liquid chemical, the diptube generating a spring force when compressed that acts to maintain a bottom end of the diptube in contact with a bottom interior surface of the container and a notch located at a bottom edge of the bottom end of the diptube that creates a flow communication between the diptube and the interior volume of the base portion of the container. In another respect, the invention is a method of constructing a container having these limitations.

Abstract: Embodiments of the present invention provide an ultrasonic probe having an increased number (e.g., twelve) of ultrasonic sensors for measuring the level of liquid within a sealed container. The ultrasonic probe includes a neck tube that enables the ultrasonic probe to be used with existing, standardized container fittings despite having an enlarged barrel to accommodate the increased number of ultrasonic sensors. Embodiments of the present invention also provide a system and method in which ultrasonic sensors within an ultrasonic probe are activated one at a time to reduce crosstalk between the ultrasonic sensors and their wiring.