Patents by Inventor Charles P. Tung

Charles P. Tung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Metal density distribution for double pattern lithography
    Patent number: 10283437
    Abstract: Methods, a computer readable medium, and an apparatus are provided. A method includes and the computer readable medium is configured for decomposing an overall pattern into a first mask pattern that includes a power rail base pattern and into a second mask pattern, and generating on the second mask pattern a power rail insert pattern that is at least partially aligned with the power rail base pattern of the first mask pattern. The apparatus is produced by photolithography using photolithographic masks generated by the method.
    Type: Grant
    Filed: November 27, 2012
    Date of Patent: May 7, 2019
    Assignee: ADVANCED MICRO DEVICES, INC.
    Inventors: Richard T. Schultz, Omid Rowhani, Charles P. Tung
  • METAL DENSITY DISTRIBUTION FOR DOUBLE PATTERN LITHOGRAPHY
    Publication number: 20140145342
    Abstract: Methods, a computer readable medium, and an apparatus are provided. A method includes and the computer readable medium is configured for decomposing an overall pattern into a first mask pattern that includes a power rail base pattern and into a second mask pattern, and generating on the second mask pattern a power rail insert pattern that is at least partially aligned with the power rail base pattern of the first mask pattern. The apparatus is produced by photolithography using photolithographic masks generated by the method.
    Type: Application
    Filed: November 27, 2012
    Publication date: May 29, 2014
    Applicant: ADVANCED MICRO DEVICES, INC.
    Inventors: Richard T. Schultz, Omid Rowhani, Charles P. Tung