Patents by Inventor Charles Peter Auglis

Charles Peter Auglis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate cleaning process
    Patent number: 6440864
    Abstract: A substrate cleaning method comprises exposing a substrate 30 to an energized process gas to remove residue 60 and resist material 50 from the substrate 30. In one version, the process gas comprises cleaning gas, such as an oxygen-containing gas, and an additive gas, such as NH3. In one version, the process gas is introduced to remove residue 60 and resist material 50 from the substrate and to remove residue from surfaces in the process chamber 75.
    Type: Grant
    Filed: June 30, 2000
    Date of Patent: August 27, 2002
    Assignee: Applied Materials Inc.
    Inventors: Thomas J. Kropewnicki, Jeremiah T. Pender, Henry Fong, Charles Peter Auglis, Raymond Hung, Hongqing Shan