Patents by Inventor Charles R. Guarnieri

Charles R. Guarnieri has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5298720
    Abstract: A process chamber having voltage driven electrodes, e.g. plasma chamber, can be made self cleaning of particle contamination by appropriate design of the workpiece or electrode surface to provide protuberances, grooves or tapers thereon which result in a predetermined pattern in the electrostatic potential within the process chamber which can trap particulate contamination in preselected regions within the plasma chamber. These particles can then be channeled out of the process chamber through a pump port.
    Type: Grant
    Filed: April 25, 1990
    Date of Patent: March 29, 1994
    Assignee: International Business Machines Corporation
    Inventors: Jerome J. Cuomo, Michael V. Grazioso, Charles R. Guarnieri, Kurt L. Haller, John E. Heidenreich, III, Gary S. Selwyn, Stanley J. Whitehair
  • Patent number: 5280154
    Abstract: A plasma processing apparatus comprising: a chamber for supporting a workpiece; an inlet for introducing a gas into the chamber; a coil of conductive material having a generally flattened configuration whereby to provide a at least one generally planar surface defined by parallel conductors disposed on the chamber; and apparatus for applying radio frequency energy to the coil.
    Type: Grant
    Filed: January 30, 1992
    Date of Patent: January 18, 1994
    Assignee: International Business Machines Corporation
    Inventors: Jerome J. Cuomo, Charles R. Guarnieri, Jeffrey A. Hopwood, Stanley J. Whitehair
  • Patent number: 5225926
    Abstract: Optical elements, and methods for fabricating them, are described wherein each element includes a free standing (self supporting) polycrystalline continuous thin film of diamond combined with a non-hydrogenated amorphous diamond like carbon (DLC) film having a high percentage of sp.sup.3 bonding. These elements may be designed to have optically smooth surfaces, have wide optical transmission ranges (for example, be transparent across the infrared portion of the spectrum), and exhibit exceptional durability characteristics. Optical instruments that include such elements are also described, along with the derivative benefits, such as improved operating performance and lower maintenance requirements, realized using the novel optical elements. In particular, a polarization Michaelson interferometer (PMI) is taught which is operative over the entire range from far infrared into the visible portion of the spectrum without requiring the exchange of beam splitters or beam polarizers.
    Type: Grant
    Filed: September 4, 1991
    Date of Patent: July 6, 1993
    Assignee: International Business Machines Corporation
    Inventors: Jerome J. Cuomo, Charles R. Guarnieri, Bruce A. Hoenig, Hajime Seki, James L. Speidell, Stanley J. Whitehair
  • Patent number: 5206213
    Abstract: A process for the preparation of oriented, ceramic oxides from a bilayer structure of a polycrystalline superconducting ceramic oxide and a second ceramic oxide material having a lower melting point than the superconducting ceramic oxide. The process comprises the steps of preparing a substrate, depositing the superconducting ceramic oxide and second ceramic oxide in alternate layers, and heat treating the resulting composite structure to obtain an oriented structure whereby the c-axes of the unit cells of the crystallites are predominantly normal to the surface of the substrate.
    Type: Grant
    Filed: March 23, 1990
    Date of Patent: April 27, 1993
    Assignee: International Business Machines Corp.
    Inventors: Jerome J. Cuomo, Charles R. Guarnieri, Eugene S. Machlin, Ronnen A. Roy, Dennis S. Yee
  • Patent number: 5179264
    Abstract: A solid state microwave generator is utilized as an excitation source for material/ plasma processes. The invention provides very close precise control of the solid state device's power levels to control the ultimate power output and frequency which control is not readily possible with vacuum tube devices. Utilizing the concepts of the invention the total power generated by the system may be easily varied and, further, the power may be easily monitored and used to control other device parameters such as frequency and the like. Because of the degree of control possible within the overall process system of the invention any measurable physical property of the process such as temperature, power, color (e.g., optical pyrometer), or the like that can be monitored and converted to a control signal can be utilized by the present system to carefully control the overall process conditions. These control features are lacking in currently available vacuum tube microwave devices.
    Type: Grant
    Filed: December 13, 1989
    Date of Patent: January 12, 1993
    Assignee: International Business Machines Corporation
    Inventors: Jerome J. Cuomo, Charles R. Guarnieri, Stanley Whitehair
  • Patent number: 4664769
    Abstract: Plasma enhancement is achieved in a plasma glow system by increasing the number of photoelectric electrons in the plasma glow by producing photoelectrons from the surface of a target in the system by the use of a radiation source. This is more particularly accomplished by flooding the surface of the target with a UV laser beam during the plasma process where emitted photoelectrons are injected into the plasma to increase the plasma density.The plasma enhancement is used in a sputter etching/deposition system which includes a chamber containing a cathode, a target, a substrate platform containing substrate and a pump. An ultraviolet light source such as a UV laser and focussing optics for focussing the UV radiation onto the target through a UV transmission window are also provided. A plasma region in the chamber is enhanced by photons from the laser striking the target and producing photoelectrons which are injected into the plasma to increase its density.
    Type: Grant
    Filed: October 28, 1985
    Date of Patent: May 12, 1987
    Assignee: International Business Machines Corporation
    Inventors: Jerome J. Cuomo, Charles R. Guarnieri
  • Patent number: 4147667
    Abstract: An improved photoconductor for GaAs laser addressed devices sensitive to illumination at about 1.5 eV is an amorphous material containing silicon, hydrogen and a material taken from the group consisting of Ge, Sn and Pb. A preferred embodiment of this invention is amorphous Si.sub.x Ge.sub.1-x H.sub.y where x equals 0.78 to 0.93 and y equals 14-20 atomic percent.
    Type: Grant
    Filed: January 13, 1978
    Date of Patent: April 3, 1979
    Assignee: International Business Machines Corporation
    Inventors: Jacques P. Chevallier, Charles R. Guarnieri, Aare Onton, Harold Wieder