Patents by Inventor Charles R. Launsby

Charles R. Launsby has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Heater assembly for high throughput chemical treatment system
    Patent number: 8115140
    Abstract: A heater assembly configured to elevate a temperature of a processing element in a chemical treatment system is described. The heater assembly may be configured to uniformly heat a large area processing element, such as a processing element that spans a plurality of substrates. Additionally, for example, the heater assembly may be configured to elevate a temperature of an upper assembly, a gas injection assembly, a substrate holder, a chamber wall, or any combination of two or more thereof.
    Type: Grant
    Filed: July 31, 2008
    Date of Patent: February 14, 2012
    Assignee: Tokyo Electron Limited
    Inventors: Charles R. Launsby, Jay R. Wallace
  • HEATER ASSEMBLY FOR HIGH THROUGHPUT CHEMICAL TREATMENT SYSTEM
    Publication number: 20100025389
    Abstract: A heater assembly configured to elevate a temperature of a processing element in a chemical treatment system is described. The heater assembly may be configured to uniformly heat a large area processing element, such as a processing element that spans a plurality of substrates. Additionally, for example, the heater assembly may be configured to elevate a temperature of an upper assembly, a gas injection assembly, a substrate holder, a chamber wall, or any combination of two or more thereof.
    Type: Application
    Filed: July 31, 2008
    Publication date: February 4, 2010
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Charles R. Launsby, Jay R. Wallace