Patents by Inventor Charles R. Szmanda

Charles R. Szmanda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150378255
    Abstract: New photoresist compositions are provided that are useful for immersion lithography. Preferred photoresist compositions of the invention comprise one or more block copolymers. Particularly preferred photoresists of the invention can exhibit reduced leaching of resist materials into an immersion fluid contacting the resist layer during immersion lithography processing.
    Type: Application
    Filed: January 30, 2015
    Publication date: December 31, 2015
    Inventors: Deyan Wang, Charles R. Szmanda, George G. Barclay, Cheng-Bai Xu
  • Patent number: 8975006
    Abstract: New photoresist compositions are provided that are useful for immersion lithography. Preferred photoresist compositions of the invention comprise one or more block copolymers. Particularly preferred photoresists of the invention can exhibit reduced leaching of resist materials into an immersion fluid contacting the resist layer dining immersion lithography processing.
    Type: Grant
    Filed: November 19, 2009
    Date of Patent: March 10, 2015
    Inventors: Deyan Wang, Charles R. Szmanda, George G. Barclay, Cheng-Bai Xu
  • Patent number: 8563088
    Abstract: A method for preparing a Group 1a-1b-3a-6a material using a selenium/Group 1b ink comprising, as initial components: a selenium component comprising selenium, an organic chalcogenide component having a formula selected from RZ—Z?R? and R2—SH, a Group 1b component and a liquid carrier; wherein Z and Z? are each independently selected from sulfur, selenium and tellurium; wherein R is selected from H, C1-20 alkyl group, a C6-20 aryl group, a C1-20 alkylhydroxy group, an arylether group and an alkylether group; wherein R? and R2 are selected from a C1-20 alkyl group, a C6-20 aryl group, a C1-20 alkylhydroxy group, an arylether group and an alkylether group; and wherein the selenium/Group 1b ink is a stable dispersion.
    Type: Grant
    Filed: October 12, 2012
    Date of Patent: October 22, 2013
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: Kevin Calzia, David Mosley, David L. Thorsen, Charles R. Szmanda
  • Patent number: 8513052
    Abstract: A method for preparing a Group 1a-1b-3a-6a material using a selenium ink comprising a chemical compound having a formula RZ—Sex—Z?R? stably dispersed in a liquid carrier is provided, wherein the selenium ink is hydrazine free and hydrazinium free.
    Type: Grant
    Filed: October 12, 2012
    Date of Patent: August 20, 2013
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: Kevin Calzia, David Mosley, Charles R. Szmanda
  • Patent number: 8309179
    Abstract: A selenium/Group 1b ink comprising, as initial components: a selenium component comprising selenium, an organic chalcogenide component having a formula selected from RZ—Z?R? and R2—SH, a Group 1b component and a liquid carrier; wherein Z and Z? are each independently selected from sulfur, selenium and tellurium; wherein R is selected from H, C1-20 alkyl group, a C6-20 aryl group, a C1-20 alkylhydroxy group, an arylether group and an alkylether group; wherein R? and R2 are selected from a C1-20 alkyl group, a C6-20 aryl group, a C1-20 alkylhydroxy group, an arylether group and an alkylether group; and wherein the selenium/Group 1b ink is a stable dispersion.
    Type: Grant
    Filed: September 28, 2009
    Date of Patent: November 13, 2012
    Assignee: Rohm and Haas Electronics Materials LLC
    Inventors: Kevin Calzia, David W. Mosley, Charles R. Szmanda, David L. Thorsen
  • Patent number: 8088467
    Abstract: Curable compositions are disclosed. Also disclosed are optical media comprising said curable compositions when cured and methods of making such optical media.
    Type: Grant
    Filed: March 5, 2008
    Date of Patent: January 3, 2012
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: Lujia Bu, Edward C. Greer, Georg R. Kestler, Alan I. Nakatani, Charles R. Szmanda
  • Publication number: 20110232758
    Abstract: A thin film photovoltaic cell is provided having a substrate; a back contact provided on the substrate; a p-type semiconductor absorber layer provided on the back contact; a n-type semiconductor layer provided on the p-type semiconductor absorber layer; a dielectric organic material layer provided on the n-type semiconductor layer; a transparent conductive film provided on the dielectric organic material layer; and, optionally, an antireflective layer provided on the transparent conductive film. Also provided is a method of manufacturing a thin film photovoltaic cell.
    Type: Application
    Filed: March 25, 2010
    Publication date: September 29, 2011
    Applicant: Rohm and Haas Electronic Materials LLC
    Inventors: Garo Khanarian, Nicola Pugliano, Charles R. Szmanda, Jae Hyung Yi
  • Publication number: 20110076799
    Abstract: A selenium/Group 1b ink comprising, as initial components: a selenium component comprising selenium, an organic chalcogenide component having a formula selected from RZ—Z?R? and R2—SH, a Group 1b component and a liquid carrier; wherein Z and Z? are each independently selected from sulfur, selenium and tellurium; wherein R is selected from H, C1-20 alkyl group, a C6-20 aryl group, a C1-20 alkylhydroxy group, an arylether group and an alkylether group; wherein R? and R2 are selected from a C1-20 alkyl group, a C6-20 aryl group, a C1-20 alkylhydroxy group, an arylether group and an alkylether group; and wherein the selenium/Group 1b ink is a stable dispersion.
    Type: Application
    Filed: September 28, 2009
    Publication date: March 31, 2011
    Applicant: ROHM AND HAAS ELECTRONIC MATERIALS LLC
    Inventors: Kevin Calzia, David W. Mosley, Charles R. Szmanda, David L. Thorsen
  • Publication number: 20110076798
    Abstract: A selenium ink comprising, as initial components: a liquid carrier; a selenium component comprising selenium; and, an organic chalcogenide component having a formula selected from RZ—Z?R? and R2—SH, a Group 1b component and a liquid carrier; wherein Z and Z? are each independently selected from sulfur, selenium and tellurium; wherein R is selected from H, C1-20 alkyl group, a C6-20 aryl group, a C1-20 alkylhydroxy group, an arylether group and an alkylether group; wherein R? and R2 are selected from a C1-20 alkyl group, a C6-20 aryl group, a C1-20 alkylhydroxy group, an arylether group and an alkylether group; wherein the selenium ink comprises ?1 wt % selenium; wherein the selenium ink is a stable dispersion and wherein the selenium ink is hydrazine and hydrazinium free.
    Type: Application
    Filed: September 28, 2009
    Publication date: March 31, 2011
    Applicant: ROHM AND HAAS ELECTRONIC MATERIALS LLC
    Inventors: Kevin Calzia, David W. Mosley, Charles R. Szmanda, David L. Thorsen
  • Publication number: 20100173245
    Abstract: New photoresist compositions are provided that are useful for immersion lithography. Preferred photoresist compositions of the invention comprise one or more block copolymers. Particularly preferred photoresists of the invention can exhibit reduced leaching of resist materials into an immersion fluid contacting the resist layer dining immersion lithography processing.
    Type: Application
    Filed: November 19, 2009
    Publication date: July 8, 2010
    Applicant: Rohm and Haas Electronic Materials LLC
    Inventors: Deyan Wang, Charles R. Szmanda, George G. Barclay, Cheng-Bai Xu
  • Patent number: 7585612
    Abstract: Underlying coating compositions are provided for use with an overcoated photoresist composition. In one aspect, the coating composition can be crosslinked and comprise one or more components that contain one or more acid-labile groups and/or one or more base-reactive groups that are reactive following crosslinking. In another aspect, underlying coating composition are provided that can be treated to provide a modulated water contact angle. Preferred coating compositions can enhance lithographic performance of an associated photoresist composition.
    Type: Grant
    Filed: July 5, 2006
    Date of Patent: September 8, 2009
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: James W. Thackeray, Gerald B. Wayton, Charles R. Szmanda
  • Patent number: 7557372
    Abstract: A composition for the formation of an electric field programmable film, the composition comprising a matrix precursor composition or a dielectric matrix material, wherein the dielectric matrix material comprises an organic polymer and/or a inorganic oxide; and an electron donor and an electron acceptor of a type and in an amount effective to provide electric field programming. The films are of utility in data storage devices.
    Type: Grant
    Filed: July 31, 2007
    Date of Patent: July 7, 2009
    Assignees: The Regents of the University of California, Rohm and Haas Company
    Inventors: Yang Yang, Jianyong Ouyang, Charles R. Szmanda
  • Patent number: 7429627
    Abstract: A substituted (meth)acrylic copolymer leveling agent is useful in producing a ferroelectric polymer film that is especially suitable for use in a data processing device. Also disclosed is a a casting composition which includes the leveling agent, a film stack, and a data processing device comprising a ferroelectric film produced using the leveling agent.
    Type: Grant
    Filed: March 8, 2004
    Date of Patent: September 30, 2008
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: Charles R. Szmanda, Kathleen B. Spear-Alfonso, Lujia Bu
  • Publication number: 20080226889
    Abstract: Curable compositions are disclosed. Also disclosed are optical media comprising said curable compositions when cured and methods of making such optical media.
    Type: Application
    Filed: March 5, 2008
    Publication date: September 18, 2008
    Applicant: Rohm and Haas Company
    Inventors: Lujia Bu, Edward C. Greer, Georg R. Kestler, Alan I. Nakatani, Charles R. Szmanda
  • Publication number: 20080062853
    Abstract: Memory devices and methods of storing and reading information are disclosed. Also disclosed are methods of storing information encoded with at least two polarization magnitudes and at least two polarization directions; wherein the polarization magnitudes provide a first channel for encoding information and the polarization directions provide a second channel for encoding information.
    Type: Application
    Filed: September 11, 2007
    Publication date: March 13, 2008
    Inventors: Lujia Bu, Edward C. Greer, Charles R. Szmanda
  • Publication number: 20080049590
    Abstract: Memory devices and methods of storing information are disclosed. Also disclosed are methods of storing information in multi-bit format and memory devices with information stored in multi-bit format. Further disclosed are methods of reading stored information.
    Type: Application
    Filed: August 10, 2007
    Publication date: February 28, 2008
    Inventors: Lujia Bu, Edward C. Greer, Charles R. Szmanda
  • Patent number: 7274035
    Abstract: A composition for the formation of an electric field programmable film, the composition comprising a matrix precursor composition or a dielectric matrix material, wherein the dielectric matrix material comprises an organic polymer and/or a inorganic oxide; and an electron donor and an electron acceptor of a type and in an amount effective to provide electric field programming. The films are of utility in data storage devices.
    Type: Grant
    Filed: August 25, 2004
    Date of Patent: September 25, 2007
    Assignee: The Regents of the University of California
    Inventors: Yang Yang, Jianyong Ouyang, Charles R. Szmanda
  • Patent number: 7214410
    Abstract: Disclosed herein is a process of forming a ferroelectric polymer film from a solution, wherein the solvent composition is selected so as to adjust the properties of the film. Films formed by this method have improved properties, particularly with respect to roughness and crystal domain size.
    Type: Grant
    Filed: September 30, 2003
    Date of Patent: May 8, 2007
    Assignee: Shipley Company, L.L.C.
    Inventors: Charles R. Szmanda, Kathleen B. Spear-Alfonso, Lujia Bu
  • Patent number: 7202009
    Abstract: This invention relates to resins and photoresist compositions that comprise such resins. Preferred polymers of the invention comprise adjacent saturated carbon atoms, either integral or pendant to the polymer backbone, that have a substantially gauche conformation. Polymers of the invention are particularly useful as a resin binder component of chemically-amplified positive-acting resists that can be effectively imaged at short wavelengths such as sub-200 nm and preferably about 157 nm. In such short-wavelength imaging applications, polymers of the invention that have a population of dihedral angles of adjacent saturated carbon atoms that are enriched in substantially gauche conformations can provide reduced undesired absorbance of the high energy exposure radiation.
    Type: Grant
    Filed: September 8, 2001
    Date of Patent: April 10, 2007
    Assignee: Shipley Company, L.L.C.
    Inventors: Peter Trefonas, III, Gary N. Taylor, Charles R. Szmanda
  • Patent number: 7118847
    Abstract: Disclosed are spirocyclic olefin polymers, methods of preparing spirocyclic olefin polymers, photresist compositions including spirocyclic olefin resin binders and methods of forming relief images using such photoresist compositions.
    Type: Grant
    Filed: October 22, 2004
    Date of Patent: October 10, 2006
    Assignee: Shipley Company LLC
    Inventors: Charles R. Szmanda, George G. Barclay, Peter Trefonas, III, Wang Yueh