Abstract: A dehumidification system includes a rotating bed containing a mass of thermally regenerable desiccant divided into a process sector and a regeneration sector. Process air flows through the process sector and regenerant air flows through the regeneration sector. A damper is provided for controlling the flow of the regenerant air, and a heating element is interposed between the damper and the regeneration sector to heat the regenerant air upstream of the regeneration sector. A recycle stream portion of the regenerant air is recirculated and conducted downstream of the ambient make-up air damper for at least one additional pass through the heating element and the regeneration sector. A heat exchanger is interposed between the process air downstream of the process sector of the rotating bed and the regenerant air upstream of the regeneration sector of the rotating bed for transferring heat from the process air to the regenerant air.

Abstract: An apparatus and process for detecting aberrations in production process operations is provided. In one embodiment, operations of a plasma etch reactor (10) are monitored to detect aberrations in etching operations. A reference end-point trace (EPT) is defined (50), regions are defined in the reference EPT (52) and characteristics and tolerances for each region are defined (54). The etcher is run (56) and an actual EPT is obtained from the running of the etcher. The actual EPT is analyzed (58) by comparing characteristics of the regions of the actual EPT with characteristics of corresponding regions of the reference EPT. If the characteristics of the actual EPT exceed those of the reference EPT by predefined tolerances (62) a signal is generated (68). The system also checks for aberrations which are manifested by predefined EPT characteristics and signals when those are detected.