Patents by Inventor Charles Seviour

Charles Seviour has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical arrangement, in particular lithography system
    Patent number: 10809636
    Abstract: An optical arrangement, in particular a lithography system, includes: a movable component, in particular a mirror; at least one actuator for moving the component; and at least one stop having a stop face for delimiting the movement of the component. The optical arrangement further includes, on a stop or on a plurality of stops, at least two stop faces for delimiting the movement of the movable component in one and the same movement direction.
    Type: Grant
    Filed: July 16, 2019
    Date of Patent: October 20, 2020
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Bernhard Gellrich, Ralf Zweering, Charles Seviour, Michael Erath, Jens Prochnau, Marwène Nefzi, Viktor Kulitzki, Axel Lorenz, Stefan Schaff
  • OPTICAL ARRANGEMENT, IN PARTICULAR LITHOGRAPHY SYSTEM
    Publication number: 20190339626
    Abstract: An optical arrangement, in particular a lithography system, includes: a movable component, in particular a mirror; at least one actuator for moving the component; and at least one stop having a stop face for delimiting the movement of the component. The optical arrangement further includes, on a stop or on a plurality of stops, at least two stop faces for delimiting the movement of the movable component in one and the same movement direction.
    Type: Application
    Filed: July 16, 2019
    Publication date: November 7, 2019
    Inventors: Bernhard Gellrich, Ralf Zweering, Charles Seviour, Michael Erath, Jens Prochnau, Marwène Nefzi, Viktor Kulitzki, Axel Lorenz, Stefan Schaff