Patents by Inventor Charles Tweed

Charles Tweed has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for characterizing the performance of an electrostatic chuck
    Patent number: 6853953
    Abstract: A method for characterizing the performance of an electrostatic chuck prior to installing the chuck in the vacuum chamber of a semiconductor processing system in a production line. One or more characteristics of the electrostatic chuck are measured and compared with the known characteristics of a reference chuck. The comparison indicates the performance of the chuck and projects the performance of the chuck in an actual operating environment. The characteristics that are measured include the chuck impedance, the current-voltage characteristic of the chuck, the local plasma density proximate the support surface of the chuck, and the cooling or heating rate of the chuck.
    Type: Grant
    Filed: August 7, 2001
    Date of Patent: February 8, 2005
    Assignee: Tokyo Electron Limited
    Inventors: Jozef Brcka, Bill Jones, Gert Leusink, Jeffrey J. Long, Bill Oliver, Charles Tweed
  • Method for characterizing the performance of an electrostatic chuck
    Publication number: 20030033116
    Abstract: A method for characterizing the performance of an electrostatic chuck prior to installing the chuck in the vacuum chamber of a semiconductor processing system in a production line. One or more characteristics of the electrostatic chuck are measured and compared with the known characteristics of a reference chuck. The comparison indicates the performance of the chuck and projects the performance of the chuck in an actual operating environment. The characteristics that are measured include the chuck impedance, the current-voltage characteristic of the chuck, the local plasma density proximate the support surface of the chuck, and the cooling or heating rate of the chuck.
    Type: Application
    Filed: August 7, 2001
    Publication date: February 13, 2003
    Applicant: Tokyo Electron Limited of TBS Broadcast Center
    Inventors: Jozef Brcka, Bill Jones, Gert Leusink, Jeffrey J. Long, Bill Oliver, Charles Tweed