Patents by Inventor Charles W. Skinner

Charles W. Skinner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for wafer processing with in situ rinse
    Patent number: 5169408
    Abstract: A wafer processing apparatus including a head defining an etching chamber, the sidewall of the head being slidable along the base so that the sidewall and base will normally define an etch chamber; and the sidewall may be moved upwardly to open a discharge passage for rinsing water, and a deflecting surface for deflecting the rinsing water downwardly and draining the rinsing water from the passage. The housing is separable above the deflector ring to provide access to the wafer for inserting the wafer and replacing it.
    Type: Grant
    Filed: January 26, 1990
    Date of Patent: December 8, 1992
    Assignee: FSI International, Inc.
    Inventors: Rex L. Biggerstaff, Charles W. Skinner, Daniel J. Syverson, Mark L. Jenson, James G. Kegley
  • Mattress and mattress cover
    Patent number: 5081728
    Abstract: A mattress comprising a plurality of parallel mattress blocks, and a mattress cover for retaining the mattress blocks together as a unit. The mattress cover has a plurality of projecting segments for insertion between adjacent mattress blocks.
    Type: Grant
    Filed: October 22, 1990
    Date of Patent: January 21, 1992
    Inventor: Charles W. Skinner