Patents by Inventor Charlotte Adams

Charlotte Adams has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor devices with robust low-k sidewall spacers and method for producing the same
    Patent number: 10192791
    Abstract: A method of forming a robust low-k sidewall spacer by exposing an upper portion of the spacer to a thermal and plasma treatment prior to downstream processes and resulting device are provided. Embodiments include providing a pair of gates separated by a canyon trench over a substrate, an EPI layer in a bottom of the canyon trench, respectively, and a low-k spacer on each opposing sidewall of the pair; forming a masking layer in a bottom portion of the canyon trench, an upper portion of the low-k spacers exposed; and treating the upper portion of the low-k spacers with a thermal and plasma treatment.
    Type: Grant
    Filed: March 6, 2018
    Date of Patent: January 29, 2019
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Man Gu, Tao Han, Junsic Hong, Jiehui Shu, Asli Sirman, Charlotte Adams, Jinping Liu, Keith Tabakman