Abstract: An apparatus and method for non-contact temperature measurement of an object, using least-squares-based multiwavelength pyrometry techniques. Radiances from an object are detected by a spectrograph/detector apparatus and are converted into electronic signals readable by a computer. The computer then operates on these signals as data to be curve-fit, using least squares analysis, to a predetermined theoretical function for the dependence of the radiance on the wavelength. When the computer has minimized the least-squares difference function, the computer identified a parameter representing the temperature and reports this value to the user, along with a collaterally calculated maximum error in the temperature estimate.

Abstract: An apparatus and method are disclosed for detecting the presence of particles on the surface of an object such as the front side of a patterned semiconductor wafer. A collimated beam of light is directed onto an area on the surface of the object at a grazing angle of incidence. A detector positioned above the surface detects light scattered from any particles which may be present on the surface, but not specularly reflected light. The output of the detector is fed into a computer where the information is processed and then displayed on a display. The surface is prepositioned relative to the incident light beam so that the diffracted light from the surface and the pattern on the surface is at a minimum. The object is then moved translationally to expose another area to the incident light beam so that the entire surface of the object or selected portions thereof can be examined, an area at a time.