Patents by Inventor Chase Parker

Chase Parker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230115177
    Abstract: A tray for an ampoule of a delivery system of solid precursor materials used in Atomic Layer Deposition (ALD) processes, Chemical Vapor Deposition (CVD) processes or both. The tray is configured to be able to have a reduced profile size when compressed to enhance the ease of which the tray can be inserted into the ampoule, and the tray is configured to expand in size to make improved contact with inner wall surfaces of the ampoule to provide improved heat transfer from the inner wall to the tray and ultimately to the solid precursor materials disposed on the tray.
    Type: Application
    Filed: October 6, 2022
    Publication date: April 13, 2023
    Inventors: Scott L. Battle, Donn K. Naito, John N. Gregg, Jacob Thomas, Chase Parker, James Schindler, Bryan C. Hendrix, Benjamin H. Olson
  • Publication number: 20230113646
    Abstract: A precursor delivery system for determining material levels and related methods can include an ampoule and at least one tray disposed in the ampoule. The at least one tray may be configured to hold an amount of a precursor material. A load cell assembly is also included. The load cell assembly may include a load cell. The load cell assembly may be coupled to the at least one tray in a configuration sufficient for the at least one tray to exert a mechanical force upon the load cell. This mechanical force may be correlative to the amount of precursor material present on the at least one tray and thus may be used to determine material levels within the ampoule.
    Type: Application
    Filed: October 4, 2022
    Publication date: April 13, 2023
    Inventors: Scott L. Battle, Benjamin Cardozo, Chase Parker