Patents by Inventor Chcol-kyu Bok

Chcol-kyu Bok has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for forming patterns of a semiconductor device
    Patent number: 6764964
    Abstract: A method for forming patterns of a semiconductor device is disclosed which inhibits collapse of photoresist patterns in photoresist pattern-forming processes of the semiconductor device by forming micro-bends in an anti-reflective film to increase the contact area between a photoresist and the anti-reflective film and, simultaneously prevents critical dimension (CD) alteration of the photoresist pattern by creating micro-bends and double-laminating of anti-reflective films with different refractive indices and light-absorbencies.
    Type: Grant
    Filed: December 30, 2002
    Date of Patent: July 20, 2004
    Assignee: Hynix Semiconductor Inc.
    Inventors: Young-sun Hwang, Jae-chang Jung, Sung-koo Lee, Chcol-kyu Bok, Ki-soo Shin